Research of photolithography technology based on surface plasmon
李海华, 陈健, 王庆康
Research of photolithography technology based on surface plasmon
Li Hai-Hua(李海华), Chen Jian(陈健), and Wang Qing-Kang(王庆康)
中国物理B . 2010, (11): 114203 -114206 .  DOI: 10.1088/1674-1056/19/11/114203