Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers
唐海马, 郑中山, 张恩霞, 于芳, 李宁, 王宁娟
Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers
Tang Hai-Ma(唐海马), Zheng Zhong-Shan(郑中山), Zhang En-Xia(张恩霞), Yu Fang(于芳), Li Ning(李宁), and Wang Ning-Juan(王宁娟)
中国物理B
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2010, (10): 106106
-106106
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DOI: 10.1088/1674-1056/19/10/106106