Influence of the total gas flow rate on high rate growth microcrystalline silicon films and solar cells
韩晓艳, 侯国付, 张晓丹, 魏长春, 李贵君, 张德坤, 陈新亮, 孙健, 张建军, 赵颖, 耿新华
Influence of the total gas flow rate on high rate growth microcrystalline silicon films and solar cells
Han Xiao-Yan(韩晓艳), Hou Guo-Fu(侯国付), Zhang Xiao-Dan(张晓丹), Wei Chang-Chun(魏长春), Li Gui-Jun(李贵君), Zhang De-Kun(张德坤), Chen Xin-Liang(陈新亮), Sun Jian(孙健), Zhang Jian-Jun(张建军), Zhao Ying(赵颖), and Geng Xin-Hua(耿新华)
中国物理B
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2009, (8): 3563
-3567
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DOI: 10.1088/1674-1056/18/8/071