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Self-consistent three-dimensional modeling and simulation of large-scale rectangular surface-wave plasma source
蓝朝晖, 蓝朝桢, 胡希伟, 陈兆权, 刘明海
Self-consistent three-dimensional modeling and simulation of large-scale rectangular surface-wave plasma source
Lan Chao-Hui(蓝朝晖), Lan Chao-Zhen(蓝朝桢), Hu Xi-Wei(胡希伟), Chen Zhao-Quan(陈兆权), and Liu Ming-Hai(刘明海)
中国物理B . 2009, (
6
): 2412 -2419 . DOI: 10.1088/1674-1056/18/6/049