Columnar growth of crystalline silicon films on aluminium-coated glass by inductively coupled plasma CVD at room temperature
王金晓, 秦艳丽, 闫恒庆, 高平奇, 栗军帅, 尹旻, 贺德衍
Columnar growth of crystalline silicon films on aluminium-coated glass by inductively coupled plasma CVD at room temperature
Wang Jin-Xiao(王金晓), Qin Yan-Li(秦艳丽), Yan Heng-Qing(闫恒庆), Gao Ping-Qi(高平奇), Li Jun-Shuai(栗军帅), Yin Min(尹旻), and He De-Yan(贺德衍)
中国物理B
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2009, (2): 773
-777
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DOI: 10.1088/1674-1056/18/2/060