Research on the boron contamination at the p/i interface of microcrystalline silicon solar cells deposited in a single PECVD chamber
孙福和, 魏长春, 孙建, 张德坤, 耿新华, 熊绍珍, 赵颖
Research on the boron contamination at the p/i interface of microcrystalline silicon solar cells deposited in a single PECVD chamber
Zhang Xiao-Dan(张晓丹), Sun Fu-He(孙福和), Wei Chang-Chun(魏长春), Sun Jian(孙建), Zhang De-Kun(张德坤), Geng Xin-Hua(耿新华), Xiong Shao-Zhen(熊绍珍), and Zhao Ying(赵颖)
中国物理B
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2009, (10): 4558
-4563
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DOI: 10.1088/1674-1056/18/10/077