The high deposition of microcrystalline silicon thin film by very high frequency plasma enhanced chemical vapour deposition and the fabrication of solar cells
陈永生, 汪建华, 卢景霄, 郑文, 谷锦华, 杨仕娥, 郜小勇, 郭学军, 赵尚丽, 高 哲
The high deposition of microcrystalline silicon thin film by very high frequency plasma enhanced chemical vapour deposition and the fabrication of solar cells
Chen Yong-Sheng(陈永生), Wang Jian-Hua(汪建华), Lu Jing-Xiao(卢景霄), Zheng Wen(郑文), Gu Jin-Hua(谷锦华), Yang Shi-E(杨仕娥), Gao Xiao-Yong(郜小勇), Guo Xue-Jun(郭学军), Zhao Shang-Li(赵尚丽), and Gao Zhe(高哲)
中国物理B
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2008, (9): 3464
-3470
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DOI: 10.1088/1674-1056/17/9/054