Simulation of plasma doping process by using the localized molecular dynamics method
冀会辉, 于民, 任黎明, 张兴, 黄如, 张有光
Simulation of plasma doping process by using the localized molecular dynamics method
Ji Hui-Hui(冀会辉), Yu Min(于民), Ren Li-Ming(任黎明), Zhang Xing(张兴), Huang Ru(黄如), and Zhang You-Guang(张有光)
中国物理B
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2008, (9): 3428
-3432
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DOI: 10.1088/1674-1056/17/9/047