Influence of HF catalyst on the microstructure properties of ultra low-k thin films prepared by sol-gel method

何志巍, 徐大印, 江祥华, 王印月

He Zhi-Wei(何志巍), Xu Da-Yin(徐大印), Jiang Xiang-Hua(江祥华), and Wang Yin-Yue(王印月)

中国物理B . 2008, (8): 3021 -3025 . DOI: 10.1088/1674-1056/17/8/043