Oxidation of silicon surface with atomic oxygen radical anions
王莲, 宋崇富, 孙剑秋, 侯莹, 李晓光, 李全新
Oxidation of silicon surface with atomic oxygen radical anions
Wang Lian(王莲), Song Chong-Fu(宋崇富), Sun Jian-Qiu(孙剑秋), Hou Ying(侯莹), Li Xiao-Guang(李晓光), and Li Quan-Xin(李全新)
中国物理B
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2008, (6): 2197
-2203
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DOI: 10.1088/1674-1056/17/6/043