Particle-in-Cell/Monte Carlo Collision simulation of planar DC magnetron sputtering
赵华玉, 牟宗信
Particle-in-Cell/Monte Carlo Collision simulation of planar DC magnetron sputtering
Zhao Hua-Yu(赵华玉) and Mu Zong-Xin(牟宗信)
中国物理B . 2008, (4): 1475 -1479 .  DOI: 10.1088/1674-1056/17/4/055