Dynamic Ni gettered by PSG from S-MIC poly-Si and its TFTs
孟志国, 李阳, 吴春亚, 赵淑芸, 李娟, 王文, 郭海诚, 熊绍珍
Dynamic Ni gettered by PSG from S-MIC poly-Si and its TFTs
Meng Zhi-Guo(孟志国), Li Yang(李阳), Wu Chun-Ya(吴春亚), Zhao Shu-Yun(赵淑芸), Li Juan(李娟), Man Wong(王文), Hoi Sing-Kwok(郭海诚), and Xiong Shao-Zhen(熊绍珍)
中国物理B
.
2008, (4): 1415
-1420
.
DOI: 10.1088/1674-1056/17/4/044