Study of He-induced nano-cavities as sinks of oxygen for forming silicon-on-insulator
李炳生, 张崇宏, 郝小鹏, 王丹妮, 周丽宏, 张洪华, 杨义涛, 张丽卿
Study of He-induced nano-cavities as sinks of oxygen for forming silicon-on-insulator
Li Bing-Sheng(李炳生), Zhang Chong-Hong(张崇宏), Hao Xiao-Peng(郝小鹏), Wang Dan-Ni(王丹妮), Zhou Li-Hong(周丽宏), Zhang Hong-Hua(张洪华), Yang Yi-Tao(杨义涛), and Zhang Li-Qing(张丽卿)
中国物理B
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2008, (10): 3836
-3840
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DOI: 10.1088/1674-1056/17/10/049