Theoretical analysis of ion kinetic energies and DLC film deposition by CH 4+Ar (He) dielectric barrier discharge plasmas
刘艳红, 张家良, 马腾才, 李建, 刘东平
Theoretical analysis of ion kinetic energies and DLC film deposition by CH 4+Ar (He) dielectric barrier discharge plasmas
Liu Yan-Hong(刘艳红), Zhang Jia-Liang(张家良), Ma Teng-Cai(马腾才), Li Jian(李建), and Liu Dong-Ping(刘东平)
中国物理B . 2007, (9): 2809 -2813 .  DOI: 10.1088/1009-1963/16/9/052