RF electric field penetration and power deposition into nonequilibrium planar-type inductively coupled plasmas

毛明, 王帅, 戴忠玲, 王友年

Mao Ming(毛明), Wang Shuai(王帅), Dai Zhong-Ling(戴忠玲), and Wang You-Nian(王友年)

中国物理B . 2007, (7): 2044 -2050 . DOI: 10.1088/1009-1963/16/7/040