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Characterization of doped hydrogenated nanocrystalline silicon films prepared by plasma enhanced chemical vapour deposition
王金良, 毋二省
Characterization of doped hydrogenated nanocrystalline silicon films prepared by plasma enhanced chemical vapour deposition
Wang Jin-Liang(王金良) and Wu Er-Xing(毋二省)
中国物理B . 2007, (
3
): 848 -853 . DOI: 10.1088/1009-1963/16/3/049