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Effect of RF power on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering
吕茂水, 庞智勇, 修显武, 戴瑛, 韩圣浩
Effect of RF power on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering
Lü Mao-Shui(吕茂水), Pang Zhi-Yong(庞智勇), Xiu Xian-Wu(修显武), Dai Ying(戴瑛), and Han Sheng-Hao(韩圣浩)
中国物理B . 2007, (
2
): 548 -552 . DOI: 10.1088/1009-1963/16/2/044