Fabrication and characteristics of high-
K HfO
2 gate dielectrics on n-germanium
韩德栋, 康晋锋, 刘晓彦, 孙雷, 罗浩, 韩汝琦
Fabrication and characteristics of high-
K HfO
2 gate dielectrics on n-germanium
Han De-Dong(韩德栋), Kang Jin-Feng(康晋锋), Liu Xiao-Yan(刘晓彦), Sun Lei(孙雷), Luo Hao(罗浩), and Han Ru-Qi(韩汝琦)
中国物理B
.
2007, (1): 245
-248
.
DOI: 10.1088/1009-1963/16/1/042