Effect of substrate temperature and pressure on properties of microcrystalline silicon films
吴志猛, 雷青松, 耿新华, 赵颖, 孙建, 奚建平
Effect of substrate temperature and pressure on properties of microcrystalline silicon films
Wu Zhi-Meng (吴志猛), Lei Qing-Song (雷青松), Geng Xin-Hua (耿新华), Zhao Ying (赵颖), Sun Jian (孙建), Xi Jian-Ping (奚建平)
中国物理B
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2006, (6): 1320
-1324
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DOI: 10.1088/1009-1963/15/6/031