Effect of substrate temperature on the growth and properties of boron-doped microcrystalline silicon films
雷青松, 吴志猛, 耿新华, 赵颖, 孙健, 奚建平
Effect of substrate temperature on the growth and properties of boron-doped microcrystalline silicon films
Lei Qing-Song (雷青松), Wu Zhi-Meng (吴志猛), Geng Xin-Hua (耿新华), Zhao Ying (赵颖), Sun Jian (孙健), Xi Jian-Ping (奚建平)
中国物理B
.
2006, (1): 213
-218
.
DOI: 10.1088/1009-1963/15/1/035