Fabrication and characterization of groove-gate MOSFETs based on a self-aligned CMOS process
马晓华, 郝跃, 孙宝刚, 高海霞, 任红霞, 张进城, 张金凤, 张晓菊, 张卫东
Fabrication and characterization of groove-gate MOSFETs based on a self-aligned CMOS process
Ma Xiao-Hua (马晓华), Hao Yue (郝跃), Sun Bao-Gang (孙宝刚), Gao Hai-Xia (高海霞), Ren Hong-Xia (任红霞), Zhang Jin-Cheng (张进城), Zhang Jin-Feng (张金凤), Zhang Xiao-Ju (张晓菊), Zhang Wei-Dong (张卫东)
中国物理B
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2006, (1): 195
-198
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DOI: 10.1088/1009-1963/15/1/031