Study of effect of H 2 addition on the production of fluorocarbon radicals in H 2C 4F 8 inductively coupled plasma via optical emission spectroscopy actinometry
黄松, 辛煜, 宁兆元
Study of effect of H 2 addition on the production of fluorocarbon radicals in H 2C 4F 8 inductively coupled plasma via optical emission spectroscopy actinometry
Huang Song (黄松), Xin Yu (辛煜), Ning Zhao-Yuan (宁兆元)
中国物理B . 2005, (8): 1608 -1612 .  DOI: 10.1088/1009-1963/14/8/025