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Study of effect of H
2
addition on the production of fluorocarbon radicals in H
2
C
4
F
8
inductively coupled plasma via optical emission spectroscopy actinometry
黄松, 辛煜, 宁兆元
Study of effect of H
2
addition on the production of fluorocarbon radicals in H
2
C
4
F
8
inductively coupled plasma via optical emission spectroscopy actinometry
Huang Song (黄松), Xin Yu (辛煜), Ning Zhao-Yuan (宁兆元)
中国物理B . 2005, (
8
): 1608 -1612 . DOI: 10.1088/1009-1963/14/8/025