Internal stress and yield strength of copper films on substrates
张建民, 张研, 徐可为
Internal stress and yield strength of copper films on substrates
Zhang Jian-Min (张建民), Zhang Yan (张研), Xu Ke-Wei (徐可为)
中国物理B . 2005, (5): 1006 -1010 .  DOI: 10.1088/1009-1963/14/5/026