Two-dimensional temperature distribution inside a hemispherical bowl-shaped target for plasma source ion implantation

刘成森, 王艳辉, 王德真

Liu Cheng-Sen (刘成森), Wang Yan-Hui (王艳辉), Wang De-Zhen (王德真)

中国物理B . 2005, (1): 163 -168 . DOI: 10.1088/1009-1963/14/1/030