PROPERITES OF HYDROGENATED AMORPHOUS SILICON CARBIDE FILMS IRRADIATED BY EXCIMER PULSE LASER
王立, 马天夫, 黄信凡, 徐俊, 李启亮, 吴状春, 陈坤基
PROPERITES OF HYDROGENATED AMORPHOUS SILICON CARBIDE FILMS IRRADIATED BY EXCIMER PULSE LASER
WANG LI (王立), MA TIAN-FU (马天夫), HUANG XIN-FAN (黄信凡), XU JUN (徐俊), LI QI-LIANG (李启亮), WU ZHUANG-CHUN (吴状春), CHEN KUN-JI (陈坤基)
中国物理B
.
1998, (12): 930
-935
.
DOI: 10.1088/1004-423X/7/12/008