BEHAVIOR OF PLASMA FORMED IN A PAGODA-SHAPED RADIO FREQUENCY PLASMA SOURCE

姚鑫兹, 江德仪, 刘训春, 叶甜春

Yao Xin-zi (姚鑫兹), Jiang De-yi (江德仪), Liu Xun-chun (刘训春), Ye Tian-chun (叶甜春)

中国物理B . 1998, (11): 823 -831 . DOI: 10.1088/1004-423X/7/11/004