STUDY ON THE OPTICAL PROPERTIES AND HYDROGEN CONTENT OF THE SILICON NITRIDE THIN FILM

陈俊芳, 任兆杏, 丁振峰

CHEN JUN-FANG (陈俊芳), REN ZHAO-XING (任兆杏), DING ZHEN-FENG (丁振峰)

中国物理B . 1995, (9): 698 -704 . DOI: 10.1088/1004-423X/4/9/008