MONTE CARLO SIMULATION OF THE ION BEAM ENHANCED DEPOSITION OF SILICON NITRIDE FILMS

邵其鋆, 潘正瑛

SHAO QI-YUN (邵其鋆), PAN ZHENG-YING (潘正瑛)

中国物理B . 1994, (9): 690 -696 . DOI: 10.1088/1004-423X/3/9/006