INVESTIGATION ON THE COMPOSITION AND STRUCTURE OF SILICON NITRIDE FILM PREPARED BY ECR-PECVD
陈俊芳, 程绍玉, 任兆杏, 张束清, 宁兆元, 吴雪梅
INVESTIGATION ON THE COMPOSITION AND STRUCTURE OF SILICON NITRIDE FILM PREPARED BY ECR-PECVD
CHEN JUN-FANG (陈俊芳), CHENG SHAO-YU (程绍玉), REN ZHAO-XING (任兆杏), ZHANG SU-QING (张束清), NING ZHAO-YUAN (宁兆元), WU XUE-MEI (吴雪梅)
中国物理B
.
1994, (9): 682
-689
.
DOI: 10.1088/1004-423X/3/9/005