NANO-CRYSTALLINE SILICON FILMS PRODUCED BY LAYER-BY-LAYER DEPOSITION TECHNIQUE AND THEIR NOVEL PROPERTIES

陈茂瑞, 陈坤基

CHEN MAO-RUI (陈茂瑞), CHEN KUN-JI (陈坤基)

中国物理B . 1994, (4): 250 -254 . DOI: 10.1088/1004-423X/3/4/002