[1] Zamboni I, Pastuović Z and Jakšić M 2013 Diam. Relat. Mater. 31 65 [2] Pearton S, Aitkaliyeva A, Xian M, Ren F, Khachatrian A, Ildefonso A, Islam Z, Rasel M A J, Haque A and Polyakov A Y 2021 ECS J. Solid State Sci. Technol. 10 055008 [3] Xu J, Dai J, Ren F Z, Wang Y F, Wang P, Xu S S, Wu S D, Lin J J, Yang Y and Guo D J 2021 Carbon 182 525 [4] Zhou C, Liu Z J, Dou X L, Wu L, Guo Y, Li Z G and Zhang C R 2025 Vacuum 233 113935 [5] Wang Y and Sun B 2024 Appl. Phys. Lett. 125 042202 [6] Zheng Y H, Lu S H and Hu X J 2024 Carbon 226 119210 [7] Rezek B,Watanabe H and Nebel C E 2006 Appl. Phys. Lett. 88 042110 [8] Rogalin V E, Ashkenazi E E, Popovich A F, Ralchenko V G, Konov V I, Aranchii S M, Ruzin M V and Uspenskii S A 2012 Russ. Microelectron 41 464 [9] Long Z M, Ben X Y, Jun W L and Bei G B 2005 Chin. Phys. Lett. 22 1264 [10] Xu B and Tian Y J 2020 Matter Radiat. at Extremes 5 068103 [11] Manfredotti C 2005 Diam. Relat. Mater. 14 531 [12] Trucchi D M, Allegrini P, Calvani P, Galbiati A, Oliver K and Conte G 2012 IEEE Electron Dev. Lett. 33 615 [13] Hirao N, Kawaguchi S I, Hirose K, Shimizu K, Ohtani E and Ohishi Y 2020 Matter Radiat. at Extremes 5 68 [14] Zeng Q S 2023 Matter Radiat. at Extremes 8 028101 [15] Shvydko Y, Stoupin S, Blank V and Terentyev S 2011 Nat. Photon. 5 539 [16] GallinML, Kim Y, Abbassi L, Bes A, Boiano C, Brambilla S, Collot J, Colombi G, Crozes T, Curtoni S, Dauvergne D, Destouches C, Donatini F, Gallin L, Ghouini O, Hostachy J Y, Iskra L, Jastrzab M, Kessedjian G, Lacoste A, Lyoussi A, Marcatili S, Motte J, Muraz J F, Nowak T, Ottaviani L, Pernot J, Portier A, Rahajandraibe W, Ramdhane M, Rydygier M, Sage C, Tchoualack A, Tribouilloy L and Yamouni M 2021 Front. Phys 9 732730 [17] Ueno K, Tadokoro T and Ueno Y 2019 Jpn. J. Appl. Phys. 58 106509 [18] Cui J M, Chen X D, Fan L L, Gong Z J, Zou C W, Sun F W, Han Z F and Guo G C 2012 Chin. Phys. Lett. 29 036103 [19] Nordlund K, Zinkle S J, Sand A E, Granberg F, Averback R S, Stoller R E, Suzudo T, Malerba L, Banhart F,WeberWJ,Willaime F, Dudarev S L and Simeone D 2018 J. Nucl. Mater. 512 450 [20] Wang Y, Lai W S and Li J H 2020 Chin. Phys. Lett. 37 016103 [21] Liu Y, Wang G, Wang S C, Yang J H, Chen L A, Qin X B, Song B, Wang B Y and Chen X L 2011 Phys. Rev. Lett. 106 087205 [22] Wang K Y, Steeds J W, Li Z H and Wang H X 2017 Appl. Phys. Lett. 110 152101 [23] Wang B, Xiong Y, Xia L S, Zhang H, Zhang K Z and Meng X Q 2011 Diam. Relat. Mater. 20 433 [24] Hickey D P, Jones K S and Elliman R G 2009 Diam. Relat. Mater. 18 1353 [25] Ardalkar R M, Salunkhe Y D, Gaonkar M P, Mane S N, Ghaisas O A, Desai S N and Reddy A V R 2024 J. Min. Inst. 266 179 [26] Salustro S, Nöel Y, M. Z C, Olivero P and Dovesi R 2016 J. Chem. Phys. 145 184701 [27] Laidlaw F, Beanland R, Fisher D and Diggle P L 2020 Acta Mater. 201 494 [28] Guo F Y, Chen B, Zeng Q Y, Yu X X, Chen K G, Kang D D, Du Y, Wu J H and Dai J Y 2023 J. Chem. Phys. 159 1089 [29] Zeng Q Y, Chen B, Zhang S, Kang D D, Wang H, Yu X X and Dai J Y 2023 npj Comput. Mater. 9 213 [30] Wang H, Guo X, Zhang L, Wang H and Xue J 2019 Appl. Phys. Lett. 114 244101 [31] Liu J H, Byggmästar J, Fan Z Y, Qian P and Su Y Y 2023 Phys. Rev. B 108 054312 [32] Li Y, Kang D D, Dai J Y and Wang L W 2024 npj Comput. Mater. 10 115 [33] Li W, Zhao H, Zeng X G, Yang X, Chi M H and Gao Y P 2025 Nucl. Instrum. Methods Phys. Res. B 559 165608 [34] Wang W L, Wang K and Deng W J 2024 Int. J. Mod. Phys. B 38 2450219 [35] Yu L T, Fan C, Gao Q Z and Lv L X 2024 J. Phys. Conf. Ser. 2882 012088 [36] Fu B, Fitzgerald S, Hou Q,Wang J and Li M 2017 Nucl. Instrum. Methods Phys. Res. B 393 169 [37] Robinson M, Marks N, Whittle K and Lumpkin G 2012 Phys. Rev. B 85 104105 [38] Guo P F, Song C Z, Wu Y N and Chen S Y 2024 Adv. Electron. Mater 10 2400014 [39] Wang D, Gao N, Setyawan W, Kurtz R J, Wang Z G, Gao X, He W H and Pang L L 2016 Chin. Phys. Lett. 33 096102 [40] Norgett M, Robinson M and Torrens I M 1975 Nucl. Eng. Des 33 50 [41] Ziegler J F, Ziegler M D and Biersack J P 2010 Nucl. Instrum. Methods Phys. Res. B 268 1818 [42] Wu W and Fahy S 1994 Phys. Rev. B 49 3030 [43] Zhou Y, Chen B, He H Y, Li B and Wang X L 2020 Nucl. Technol. 206 32 [44] Holmström E, Nordlund K and Kuronen A 2010 Phys. Scr. 81 035601 [45] Erginsoy C, Vineyard G and Englert A 1964 Phys. Rev. 133 A595 [46] Delgado D and Vila R 2011 J. Nucl. Mater. 419 32 [47] Jin Y N, Huang H, Zhong Y H, Yuan X T, Li H, Lou D, Xie K, Liu Z X, Cai B and Peng Q 2022 Ceram. Int. 48 16813 [48] Buchan J T, Robinson M, Christie H J, Roach D L, Ross D K and Marks N A 2015 J. Appl. Phys. 117 245901 [49] Liu T, Shao T, Lyu F, Lai X and Shen A H 2022 Model. Simul. Mater. Sci. Eng. 30 035005 [50] Delgado D and Vila R 2011 J. Nucl. Mater. 419 32 [51] Devanathan R, Diaz de la Rubia T andWeberWJ 1998 J. Nucl. Mater. 253 47 [52] Ziegler J F and Biersack J P 1985 The Stopping and Range of Ions in Matter (Boston: Springer) p. 93 [53] Stukowski A 2009 Model. Simul. Mater. Sci. Eng. 18 015012 [54] Saada D, Adler J and Kalish R 1999 Phys. Rev. B 59 6650 [55] Prins J, Derry T and Sellschop J 1986 Phys. Rev. B 34 8870 [56] Koike J, Parkin D and Mitchell T 1992 Appl. Phys. Lett. 60 1450 [57] Robinson M, Marks N A and Lumpkin G R 2012 Phys. Rev. B 86 134105 [58] Brenner D W and Shenderova O A 2015 Phil. Trans. R. Soc. A. 373 20140139 [59] Slepetz B K, Miklos 2014 Phys. Chem. Chem. Phys. 16 1515 [60] Mainwood A 1999 Diam. Relat. Mater. 8 1560 [61] Setyawan W, Nandipati G, Roche K J, Heinisch H L, Wirth B D and Kurtz R J 2015 J. Nucl. Mater. 462 329 [62] Fu J, Chen Y C, Fang J Z, Gao N, Hu W Y, Jiang C, Zhou H B, Lu G H, Gao F and Deng H Q 2019 J. Nucl. Mater. 524 9 |