中国物理B ›› 2024, Vol. 33 ›› Issue (9): 98701-098701.doi: 10.1088/1674-1056/ad4ff4

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Interfacial stress engineering toward enhancement of ferroelectricity in Al doped HfO2 thin films

S X Chen(陈思学)1, M M Chen(陈明明)1,†, Y Liu(刘圆)1, D W Cao(曹大威)2, and G J Chen(陈国杰)3   

  1. 1 Department of Microelectronics, Jiangsu University, Zhenjiang 212013, China;
    2 Department of Physics, Jiangsu University, Zhenjiang 212013, China;
    3 Guangdong-Hong Kong-Macao Joint Laboratory for Intelligent Micro-Nano Optoelectronic Technology, Foshan University, Foshan 528225, China
  • 收稿日期:2024-01-28 修回日期:2024-05-22 接受日期:2024-05-24 出版日期:2024-08-15 发布日期:2024-08-15
  • 通讯作者: M M Chen E-mail:andychain@live.cn
  • 基金资助:
    Research Fund of Guangdong-Hong Kong-Macao Joint Laboratory for Intelligent Micro-Nano Optoelectronic Technology, China (Grant No. 2020B1212030010) and Project of Faculty of Agricultural Equipment of Jiangsu University (Grant No. NZXB20210202) are acknowledged.

Interfacial stress engineering toward enhancement of ferroelectricity in Al doped HfO2 thin films

S X Chen(陈思学)1, M M Chen(陈明明)1,†, Y Liu(刘圆)1, D W Cao(曹大威)2, and G J Chen(陈国杰)3   

  1. 1 Department of Microelectronics, Jiangsu University, Zhenjiang 212013, China;
    2 Department of Physics, Jiangsu University, Zhenjiang 212013, China;
    3 Guangdong-Hong Kong-Macao Joint Laboratory for Intelligent Micro-Nano Optoelectronic Technology, Foshan University, Foshan 528225, China
  • Received:2024-01-28 Revised:2024-05-22 Accepted:2024-05-24 Online:2024-08-15 Published:2024-08-15
  • Contact: M M Chen E-mail:andychain@live.cn
  • Supported by:
    Research Fund of Guangdong-Hong Kong-Macao Joint Laboratory for Intelligent Micro-Nano Optoelectronic Technology, China (Grant No. 2020B1212030010) and Project of Faculty of Agricultural Equipment of Jiangsu University (Grant No. NZXB20210202) are acknowledged.

摘要: Ferroelectric HfO$_{2}$ has attracted much attention owing to its superior ferroelectricity at an ultra-thin thickness and good compatibility with Si-based complementary metal-oxide-semiconductor (CMOS) technology. However, the crystallization of polar orthorhombic phase (o-phase) HfO$_{2}$ is less competitive, which greatly limits the ferroelectricity of the as-obtained ferroelectric HfO$_{2}$ thin films. Fortunately, the crystallization of o-phase HfO$_{2}$ can be thermodynamically modulated via interfacial stress engineering. In this paper, the growth of improved ferroelectric Al doped HfO$_{2}$ (HfO$_{2}$:Al) thin films on (111)-oriented Si substrate has been reported. Structural analysis has suggested that nonpolar monoclinic HfO$_{2}$:Al grown on (111)-oriented Si substrate suffered from a strong compressive strain, which promoted the crystallization of (111)-oriented o-phase HfO$_{2}$ in the as-grown HfO$_{2}$:Al thin films. In addition, the in-plane lattice of (111)-oriented Si substrate matches well with that of (111)-oriented o-phase HfO$_{2}$, which further thermally stabilizes the o-phase HfO$_{2}$. Accordingly, an improved ferroelectricity with a remnant polarization (2$P_{\rm r}$) of 26.7 μC/cm$^{2}$ has been obtained. The results shown in this work provide a simple way toward the preparation of improved ferroelectric HfO$_{2}$ thin films.

关键词: improved ferroelectricity, interfacial stress engineering, compressive strain, HfO$_{2}$

Abstract: Ferroelectric HfO$_{2}$ has attracted much attention owing to its superior ferroelectricity at an ultra-thin thickness and good compatibility with Si-based complementary metal-oxide-semiconductor (CMOS) technology. However, the crystallization of polar orthorhombic phase (o-phase) HfO$_{2}$ is less competitive, which greatly limits the ferroelectricity of the as-obtained ferroelectric HfO$_{2}$ thin films. Fortunately, the crystallization of o-phase HfO$_{2}$ can be thermodynamically modulated via interfacial stress engineering. In this paper, the growth of improved ferroelectric Al doped HfO$_{2}$ (HfO$_{2}$:Al) thin films on (111)-oriented Si substrate has been reported. Structural analysis has suggested that nonpolar monoclinic HfO$_{2}$:Al grown on (111)-oriented Si substrate suffered from a strong compressive strain, which promoted the crystallization of (111)-oriented o-phase HfO$_{2}$ in the as-grown HfO$_{2}$:Al thin films. In addition, the in-plane lattice of (111)-oriented Si substrate matches well with that of (111)-oriented o-phase HfO$_{2}$, which further thermally stabilizes the o-phase HfO$_{2}$. Accordingly, an improved ferroelectricity with a remnant polarization (2$P_{\rm r}$) of 26.7 μC/cm$^{2}$ has been obtained. The results shown in this work provide a simple way toward the preparation of improved ferroelectric HfO$_{2}$ thin films.

Key words: improved ferroelectricity, interfacial stress engineering, compressive strain, HfO$_{2}$

中图分类号:  (Phase transitions)

  • 87.15.Zg
64.60.Ej (Studies/theory of phase transitions of specific substances) 81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)) 61.05.cp (X-ray diffraction)