[1] Blanco-Redondo A, Andonegui I, Collins M J, Harari G, Lumer Y, Rechtsman M C, Eggleton B J and Segev M 2016 Phys. Rev. Lett. 116 163901 [2] Ding Y, Xu J, Da Ros F, Huang B, Ou H and Peucheret C 2013 Opt. Express 21 10376 [3] Li A D, Dong J J, Wang J, Cheng Z W, Ho J S, Zhang D W, Wen J, Zhang X L, Chan C T, Andrea Alù, Qiu C W and Chen L 2020 Phys. Rev. Lett. 125 187403 [4] Meng Y, Wu X X, Shen Y X, Liu D, Liang Z X, Zhang X and Jensen Li 2022 Sci. China-Phys. Mech. Astron. 65 224611 [5] Hu Y, Yu M, Zhu D, Sinclair N, Shams-Ansari A, Shao L, Holzgrafe J, Puma E, Zhang M and Lončar M 2021 Nature 599 587 [6] Wan X, Peng C Y, Li G, Yang J H and Qi X Y 2023 Chin. Phys. B 32 114208 [7] Shu X Q, Li A D, Hu G W, Wang J, Alù A and Chen L 2022 Nat. Commun. 13 2123 [8] Li A D, Chen W J, Wei H, Lu G W, Alù A, Qiu C W and Chen L 2022 Phys. Rev. Lett. 129 127401 [9] Li A D, Wei H, Michele Cotrufo, Chen W J, Sander Mann, Ni X, Xu B C, Chen J F, Wang J, Fan S H, Qiu C W, Alù A and Chen L 2023 Nat. Nanotechnol. 18 706 [10] Shu X Q, Zhong Q, Hong K, You O B, Wang J, Hu G W, Alù A, Zhang S, Demetrios N Christodoulides and Chen L 2024 Light. Sci. Appl. 13 65 [11] Wang J, Ashrafi R, Adams R, Glesk I, Gasulla I, Capmany J and Chen L R 2016 Sci. Rep. 6 30235 [12] Zhou Z, Yin B and Michel J 2015 Light Sci. Appl. 4 e358 [13] Liang Y, Li C, Huang Y Z and Zhang Q 2020 ACS Nano 14 14375 [14] Amin R, Suer C, Ma Z, Sarpkaya I, Khurgin J B, Agarwal R and Sorger V J 2017 Solid State Electron. 136 101 [15] Wang C, Zhang M, Chen X, Bertrand M, Shams-Ansari A, Chandrasekhar S, Winzer P and Lončar M 2018 Nature 562 101 [16] Assefa S, Xia F and Vlasov Y A 2010 Nature 464 80 [17] Marcatili E A 1969 Bell Syst. Tech. J. 48 2071 [18] Cooper M L, Gupta G, Schneider M A, Green W M, Assefa S, Xia F, Gifford D K and Mookherjea S 2010 Opt. Lett. 35 3030 [19] Groves T R 2014 Nanolithography (Sawston Cambridge: Woodhead Publishing) pp. 80-115 [20] Awad M and Cheville R A 2005 Appl. Phys. Lett. 86 221107 [21] Rajurkar K P, Levy G, Malshe A, Sundaram M, McGeough J, Hu X, Resnick R, DeSilva A and DeSilva A 2006 CIRP Ann. Manuf. Technol. 55 643 [22] Chen J F and Li Z Y 2022 Chin. Phys. B 31 114207 [23] Xu Z H, Xia X and Chen S 2022 Sci. China-Phys. Mech. Astron. 65 227211 [24] Xu H S and Jin L 2023 Phys. Rev. Res. 5 L042005 [25] Wu H C, Xu H S, Xie L C and Jin L 2024 Phys. Rev. Lett. 132 083801 [26] Wang P, Jin L and Song Z 2024 Phys. Rev. B 109 115406 [27] Lustig E, Weimann S, Plotnik Y, Lumer Y, Bandres M A, Szameit A and Segev M 2019 Nature 567 356 [28] Zhu X Y, Fu J C, Ding F, Jin Y and Wu A M 2018 Sci. Rep. 8 15240 [29] Xiao L, Zhan X, Bian Z H, Wang K, Zhang X, Wang X P, Li J, Mochizuki K, Kim D, Kawakami N, Yi W, Obuse H, Sanders B C and Xue P 2017 Nat. Phys. 13 1117 [30] Krauss T F 2008 Nat. Photon. 2 448 [31] Dokania R K and Apsel A B 2009 Proceedings of the 19th ACM Great Lakes Symposium on VLSI, May 10-12, 2009, Boston, USA, p. 275 [32] Thompson M G, Politi A, Matthews J C and O’Brien J L 2011 IET Circuits Dev. Syst. 5 94 [33] Chen Y, He X T, Cheng Y J, Qiu H Y, Feng L T, Zhang M, Dai D X, Guo G C, Dong J W and Ren X F 2021 Phys. Rev. Lett. 126 230503 [34] Song W, Sun W, Chen C, Song Q, Xiao S, Zhu S and T Li 2020 Laser Photon. Rev. 14 1900193 [35] Zhao X J, Hamed Dalir, Xu X C and Chen R T 2017 Appl. Phys. Express 10 072502 [36] Reithmaier J P, Sȩk G, Löffler A, Hofmann C, Kuhn S, Reitzenstein S, Kulakovskii V D, Reinecke T L and Forchel A 2004 Nature 432 197 [37] Chuang S L 1987 J. Light. Technol. 5 5 [38] Asbóth J K, Oroszl ány L and P ályi A 2016 A Short Course on Topological Insulators, Vol. 919 (Switzerland: Springer International Publishing) pp. 1-22 [39] Xu B C, Xie B Y, Xu L H, Deng M, Chen W, Wei H, Dong F, Wang J, Qiu C W, Zhang S and Chen L 2023 Adv. Photon. 5 036005 |