中国物理B ›› 2022, Vol. 31 ›› Issue (10): 108103-108103.doi: 10.1088/1674-1056/ac76ac

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

High-sensitivity refractive index sensors based on Fano resonance in a metal-insulator-metal based arc-shaped resonator coupled with a rectangular stub

Shubin Yan(闫树斌)1,†, Hao Su(苏浩)2, Xiaoyu Zhang(张晓宇)3, Yi Zhang(张怡)1, Zhanbo Chen(陈展博)1, Xiushan Wu(吴秀山)1, and Ertian Hua(华尔天)1   

  1. 1. School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Zhejiang-Belarus Joint Laboratory of Intelligent Equipment and System for Water Conservancy and Hydropower Safety Monitoring, Hangzhou 310018, China;
    2. Hangzhou Hikvision Digital Technology Co., Ltd., Hangzhou 310018, China;
    3. School of Electrical and Control Engineering, North University of China, Taiyuan 030051, China
  • 收稿日期:2022-04-18 修回日期:2022-05-27 出版日期:2022-10-16 发布日期:2022-09-24
  • 通讯作者: Shubin Yan E-mail:yanshb@zjweu.edu.cn
  • 基金资助:
    The work was supported in part by the National Natural Science Foundation of China (Grant Nos. 61875250 and 61975189), the Zhejiang Provincial Natural Science Foundation of China (Grant Nos. LD21F050001 and Y21F040001), the Key Research Project by Department of Water Resources of Zhejiang Province (Grant No. RA2101), the Key Research and Development Project of Zhejiang Province (Grant No. 2021C03019), the Key R&D Projects of Shanxi Province (Grant Nos. 201903D421032 and 01804D131038), and the Scientific Research Foundation of Zhejiang University of Water Resources and Electric Power (Grant No. xky2022032).

High-sensitivity refractive index sensors based on Fano resonance in a metal-insulator-metal based arc-shaped resonator coupled with a rectangular stub

Shubin Yan(闫树斌)1,†, Hao Su(苏浩)2, Xiaoyu Zhang(张晓宇)3, Yi Zhang(张怡)1, Zhanbo Chen(陈展博)1, Xiushan Wu(吴秀山)1, and Ertian Hua(华尔天)1   

  1. 1. School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Zhejiang-Belarus Joint Laboratory of Intelligent Equipment and System for Water Conservancy and Hydropower Safety Monitoring, Hangzhou 310018, China;
    2. Hangzhou Hikvision Digital Technology Co., Ltd., Hangzhou 310018, China;
    3. School of Electrical and Control Engineering, North University of China, Taiyuan 030051, China
  • Received:2022-04-18 Revised:2022-05-27 Online:2022-10-16 Published:2022-09-24
  • Contact: Shubin Yan E-mail:yanshb@zjweu.edu.cn
  • Supported by:
    The work was supported in part by the National Natural Science Foundation of China (Grant Nos. 61875250 and 61975189), the Zhejiang Provincial Natural Science Foundation of China (Grant Nos. LD21F050001 and Y21F040001), the Key Research Project by Department of Water Resources of Zhejiang Province (Grant No. RA2101), the Key Research and Development Project of Zhejiang Province (Grant No. 2021C03019), the Key R&D Projects of Shanxi Province (Grant Nos. 201903D421032 and 01804D131038), and the Scientific Research Foundation of Zhejiang University of Water Resources and Electric Power (Grant No. xky2022032).

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摘要： A metal-insulator-metal (MIM)-based arc-shaped resonator coupled with a rectangular stub (MARS) structure is proposed. This structure can generate two tunable Fano resonances originating from two different mechanisms. The structure has the advantage of being sensitive to the refractive index, and this feature makes it favorable for application in various microsensors. The relationship between the structural parameters and Fano resonance is researched using the finite element method (FEM) based on the software COMSOL Multiphysics 5.4. The simulation reveals that the sensitivity reaches 1900 nm/refractive index unit (RIU), and the figure of merit (FOM) is 23.75.

关键词: Fano resonance, metal-insulator-metal (MIM) waveguide, refractive index sensor, Fabry—Perot (F-P) cavity

Abstract: A metal-insulator-metal (MIM)-based arc-shaped resonator coupled with a rectangular stub (MARS) structure is proposed. This structure can generate two tunable Fano resonances originating from two different mechanisms. The structure has the advantage of being sensitive to the refractive index, and this feature makes it favorable for application in various microsensors. The relationship between the structural parameters and Fano resonance is researched using the finite element method (FEM) based on the software COMSOL Multiphysics 5.4. The simulation reveals that the sensitivity reaches 1900 nm/refractive index unit (RIU), and the figure of merit (FOM) is 23.75.

Key words: Fano resonance, metal-insulator-metal (MIM) waveguide, refractive index sensor, Fabry—Perot (F-P) cavity

中图分类号:  (Nanoelectromechanical systems (NEMS))

  • 81.07.Oj
87.85.Ox (Biomedical instrumentation and micro-electro-mechanical systems (MEMS))