中国物理B ›› 2021, Vol. 30 ›› Issue (11): 117401-117401.doi: 10.1088/1674-1056/abff20

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Design, fabrication, and characterization of Ti/Au transition-edge sensor with different dimensions of suspended beams

Hong-Jun Zhang(张宏俊)1, Ji Wen(文继)1, Zhao-Hong Mo(莫钊洪)1, Hong-Rui Liu(刘鸿瑞)2, Xiao-Dong Wang(汪小东)1, Zhong-Hua Xiong(熊忠华)1, Jin-Wen Zhang(张锦文)2,3,†, and Mao-Bing Shuai(帅茂兵)1,‡   

  1. 1 Institute of Materials, China Academy of Engineering Physics, Mianyang 621000, China;
    2 Institute of Microelectronics, Peking University, Beijing 100871, China;
    3 National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
  • 收稿日期:2021-01-19 修回日期:2021-03-04 接受日期:2021-05-08 出版日期:2021-10-13 发布日期:2021-11-03
  • 通讯作者: Jin-Wen Zhang, Mao-Bing Shuai E-mail:zhangjinwen@pku.edu.cn;shuaimb@sina.com

Design, fabrication, and characterization of Ti/Au transition-edge sensor with different dimensions of suspended beams

Hong-Jun Zhang(张宏俊)1, Ji Wen(文继)1, Zhao-Hong Mo(莫钊洪)1, Hong-Rui Liu(刘鸿瑞)2, Xiao-Dong Wang(汪小东)1, Zhong-Hua Xiong(熊忠华)1, Jin-Wen Zhang(张锦文)2,3,†, and Mao-Bing Shuai(帅茂兵)1,‡   

  1. 1 Institute of Materials, China Academy of Engineering Physics, Mianyang 621000, China;
    2 Institute of Microelectronics, Peking University, Beijing 100871, China;
    3 National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
  • Received:2021-01-19 Revised:2021-03-04 Accepted:2021-05-08 Online:2021-10-13 Published:2021-11-03
  • Contact: Jin-Wen Zhang, Mao-Bing Shuai E-mail:zhangjinwen@pku.edu.cn;shuaimb@sina.com

摘要: For photon detection, superconducting transition-edge sensor (TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devices were designed and implemented with a thickness ratio of 1:1 and different suspended structures using micromachining technology. The characteristics were evaluated and analyzed, including surface morphology, 3D deformation of suspended Ti/Au TES device structure, I-V characteristics, and low-temperature superconductivity. The results showed that the surface of Ti/Au has good homogeneity and the surface roughness of Ti/Au is significantly increased compared with the substrate. The structure of Ti/Au bilayer film significantly affects the deformation of suspended devices, but the deformation does not affect the I-V characteristics of the devices. For devices with the Ti/Au bilayer (150μm×150μm) and beams (100μm×25μm), the transition temperature (Tc) is 253 mK with a width of 6 mK, and the value of the temperature sensitivity α is 95.1.

关键词: transition-edge sensor, Ti/Au, superconductivity film, microfabrication, deformation of suspended structure

Abstract: For photon detection, superconducting transition-edge sensor (TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devices were designed and implemented with a thickness ratio of 1:1 and different suspended structures using micromachining technology. The characteristics were evaluated and analyzed, including surface morphology, 3D deformation of suspended Ti/Au TES device structure, I-V characteristics, and low-temperature superconductivity. The results showed that the surface of Ti/Au has good homogeneity and the surface roughness of Ti/Au is significantly increased compared with the substrate. The structure of Ti/Au bilayer film significantly affects the deformation of suspended devices, but the deformation does not affect the I-V characteristics of the devices. For devices with the Ti/Au bilayer (150μm×150μm) and beams (100μm×25μm), the transition temperature (Tc) is 253 mK with a width of 6 mK, and the value of the temperature sensitivity α is 95.1.

Key words: transition-edge sensor, Ti/Au, superconductivity film, microfabrication, deformation of suspended structure

中图分类号:  (Superconducting films and low-dimensional structures)

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