Fabrication and characterization of Al-Mn superconducting films for applications in TES bolometers

doi:10.1088/1674-1056/abe0c6

中国物理B ›› 2021, Vol. 30 ›› Issue (7): 77402-077402.doi: 10.1088/1674-1056/abe0c6

Fabrication and characterization of Al-Mn superconducting films for applications in TES bolometers

Qing Yu(余晴)^1,2, Yi-Fei Zhang(张翼飞)³, Chang-Hao Zhao(赵昌昊)^1,2, Kai-Yong He(何楷泳)^1,2, Ru-Tian Huang(黄汝田)^1,2, Yong-Cheng He(何永成)^1,2, Xin-Yu Wu(吴歆宇)^1,2, Jian-She Liu(刘建设)^1,2, and Wei Chen(陈炜)^1,2,4,†

1 Department of Microelectronics and Nanoelectronics, Tsinghua University, Beijing 100084, China;
2 Beijing National Research Center for Information Science and Technology, Beijing 100084, China;
3 Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China;
4 Tsinghua University Future Chip Technology Advanced Innovation Center, Beijing 100084, China

收稿日期:2020-11-11 修回日期:2021-01-24 接受日期:2021-01-28 出版日期:2021-06-22 发布日期:2021-06-26
通讯作者: Wei Chen E-mail:weichen@mail.tsinghua.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 11653001 and 11653004).

Fabrication and characterization of Al-Mn superconducting films for applications in TES bolometers

1 Department of Microelectronics and Nanoelectronics, Tsinghua University, Beijing 100084, China;
2 Beijing National Research Center for Information Science and Technology, Beijing 100084, China;
3 Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China;
4 Tsinghua University Future Chip Technology Advanced Innovation Center, Beijing 100084, China

Received:2020-11-11 Revised:2021-01-24 Accepted:2021-01-28 Online:2021-06-22 Published:2021-06-26
Contact: Wei Chen E-mail:weichen@mail.tsinghua.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 11653001 and 11653004).

摘要/Abstract

摘要： Superconducting transition edge sensor (TES) bolometers require superconducting films to have controllable transition temperatures T_c in different practical applications. The value of T_c strongly affects thermal conductivity and thermal noise performance of TES detectors. Al films doped with Mn (Al-Mn) of different concentrations can accomplish tunable T_c. A magnetron sputtering machine is used to deposit the Al-Mn films in this study. Fabrication parameters including sputtering pressure and annealing process are studied and their influences on T_c and superconducting transition width ΔT_c are optimized. The Al-Mn films with Δ T_c below 1.0 mK for T_c in a range of 520 mK-580 mK are successfully fabricated.

关键词: Al-Mn superconducting films, deposition process, annealing process, superconducting transition edge sensor

Abstract: Superconducting transition edge sensor (TES) bolometers require superconducting films to have controllable transition temperatures T_c in different practical applications. The value of T_c strongly affects thermal conductivity and thermal noise performance of TES detectors. Al films doped with Mn (Al-Mn) of different concentrations can accomplish tunable T_c. A magnetron sputtering machine is used to deposit the Al-Mn films in this study. Fabrication parameters including sputtering pressure and annealing process are studied and their influences on T_c and superconducting transition width ΔT_c are optimized. The Al-Mn films with Δ T_c below 1.0 mK for T_c in a range of 520 mK-580 mK are successfully fabricated.

Key words: Al-Mn superconducting films, deposition process, annealing process, superconducting transition edge sensor

中图分类号: (Effects of crystal defects, doping and substitution)

74.62.Dh

81.15.-z (Methods of deposition of films and coatings; film growth and epitaxy) 81.40.Ef (Cold working, work hardening; annealing, post-deformation annealing, quenching, tempering recovery, and crystallization) 85.25.Oj (Superconducting optical, X-ray, and γ-ray detectors (SIS, NIS, transition edge))

Qing Yu(余晴), Yi-Fei Zhang(张翼飞), Chang-Hao Zhao(赵昌昊), Kai-Yong He(何楷泳), Ru-Tian Huang(黄汝田), Yong-Cheng He(何永成), Xin-Yu Wu(吴歆宇), Jian-She Liu(刘建设), and Wei Chen(陈炜). Fabrication and characterization of Al-Mn superconducting films for applications in TES bolometers[J]. 中国物理B, 2021, 30(7): 77402-077402.

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Fabrication and characterization of Al-Mn superconducting films for applications in TES bolometers

Fabrication and characterization of Al-Mn superconducting films for applications in TES bolometers

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