Fabrication of microresonators by using photoresist developer as etchant

doi:10.1088/1674-1056/abf112

中国物理B ›› 2021, Vol. 30 ›› Issue (6): 60313-060313.doi: 10.1088/1674-1056/abf112

所属专题： SPECIAL TOPIC — Quantum computation and quantum simulation

Fabrication of microresonators by using photoresist developer as etchant

National Laboratory of Solid State Microstructures, School of Physics, Nanjing University, Nanjing 210093, China

收稿日期:2020-11-18 修回日期:2021-03-02 接受日期:2021-03-23 出版日期:2021-05-18 发布日期:2021-06-05
通讯作者: Yang Yu E-mail:yuyang@nju.edu.cn
基金资助:
Project supported by the National Key R&D Program of China (Grant No. 2016YFA0301802), the National Natural Science Foundation of China (Grant Nos. 61521001 and 11890704), and the Key R&D Program of Guangdong Province, China (Grant No. 2018B030326001).

Fabrication of microresonators by using photoresist developer as etchant

National Laboratory of Solid State Microstructures, School of Physics, Nanjing University, Nanjing 210093, China

Received:2020-11-18 Revised:2021-03-02 Accepted:2021-03-23 Online:2021-05-18 Published:2021-06-05
Contact: Yang Yu E-mail:yuyang@nju.edu.cn
Supported by:
Project supported by the National Key R&D Program of China (Grant No. 2016YFA0301802), the National Natural Science Foundation of China (Grant Nos. 61521001 and 11890704), and the Key R&D Program of Guangdong Province, China (Grant No. 2018B030326001).

摘要/Abstract

摘要： In superconducting circuit, microwave resonators and capacitors are crucial components, and their quality has a strong impact on circuit performance. Here we develop a novel wet etching process to define these two components using common photoresist developer as etchant. This method reduces subsequent steps and can be completed immediately after development. By measuring the internal quality factor of resonators, we show that it is possible to achieve similar or better performance when compared with samples made by standard etching processes. This easy-to-implement method may boost the yield hence providing an alternative fabrication process for microwave resonators and capacitors.

关键词: superconducting qubit, microresonator, easy-to-implement, high quality factors

Abstract: In superconducting circuit, microwave resonators and capacitors are crucial components, and their quality has a strong impact on circuit performance. Here we develop a novel wet etching process to define these two components using common photoresist developer as etchant. This method reduces subsequent steps and can be completed immediately after development. By measuring the internal quality factor of resonators, we show that it is possible to achieve similar or better performance when compared with samples made by standard etching processes. This easy-to-implement method may boost the yield hence providing an alternative fabrication process for microwave resonators and capacitors.

Key words: superconducting qubit, microresonator, easy-to-implement, high quality factors

中图分类号: (Quantum computation architectures and implementations)

03.67.Lx

85.25.Am (Superconducting device characterization, design, and modeling)

Shu-Qing Song(宋树清), Jian-Wen Xu(徐建文), Zhi-Kun Han(韩志坤), Xiao-Pei Yang(杨晓沛), Yu-Ting Sun(孙宇霆), Xiao-Han Wang(王晓晗), Shao-Xiong Li(李邵雄), Dong Lan(兰栋), Jie Zhao(赵杰), Xin-Sheng Tan(谭新生), and Yang Yu(于扬). Fabrication of microresonators by using photoresist developer as etchant[J]. 中国物理B, 2021, 30(6): 60313-060313.

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Fabrication of microresonators by using photoresist developer as etchant

Fabrication of microresonators by using photoresist developer as etchant

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