中国物理B ›› 2020, Vol. 29 ›› Issue (8): 84207-084207.doi: 10.1088/1674-1056/ab943b

• SPECIAL TOPIC—Ultracold atom and its application in precision measurement • 上一篇    下一篇

Low-power electro-optic phase modulator based on multilayer graphene/silicon nitride waveguide

Lanting Ji(姬兰婷), Wei Chen(陈威), Yang Gao(高阳), Yan Xu(许言), Chi Wu(吴锜), Xibin Wang(王希斌), Yunji Yi(衣云骥), Baohua Li(李宝华), Xiaoqiang Sun(孙小强), Daming Zhang(张大明)   

  1. 1 State Key Laboratory of Integrated Optoelectronics, College of Electronic Science&Engineering, Jilin University, Changchun 130012, China;
    2 Institute of Marine Science and Technology, Shandong University, Qingdao 250100, China
  • 收稿日期:2020-02-13 修回日期:2020-04-02 出版日期:2020-08-05 发布日期:2020-08-05
  • 通讯作者: Xiaoqiang Sun E-mail:sunxq@jlu.edu.cn
  • 基金资助:
    Project supported by the National Key Research and Development Program of China (Grant No. 2019YFB2203001), the National Natural Science Foundation of China (Grant Nos. 61675087, 61875069, and 61605057), and the Science and Technology Development Plan of Jilin Province, China (Grant No. JJKH20190118KJ).

Low-power electro-optic phase modulator based on multilayer graphene/silicon nitride waveguide

Lanting Ji(姬兰婷)1,2, Wei Chen(陈威)1, Yang Gao(高阳)1, Yan Xu(许言)1, Chi Wu(吴锜)2, Xibin Wang(王希斌)1, Yunji Yi(衣云骥)1, Baohua Li(李宝华)1, Xiaoqiang Sun(孙小强)1, Daming Zhang(张大明)1   

  1. 1 State Key Laboratory of Integrated Optoelectronics, College of Electronic Science&Engineering, Jilin University, Changchun 130012, China;
    2 Institute of Marine Science and Technology, Shandong University, Qingdao 250100, China
  • Received:2020-02-13 Revised:2020-04-02 Online:2020-08-05 Published:2020-08-05
  • Contact: Xiaoqiang Sun E-mail:sunxq@jlu.edu.cn
  • Supported by:
    Project supported by the National Key Research and Development Program of China (Grant No. 2019YFB2203001), the National Natural Science Foundation of China (Grant Nos. 61675087, 61875069, and 61605057), and the Science and Technology Development Plan of Jilin Province, China (Grant No. JJKH20190118KJ).

摘要: Electro-optic modulator is a key component for on-chip optical signal processing. An electro-optic phase modulator based on multilayer graphene embedded in silicon nitride waveguide is demonstrated to fulfill low-power operation. Finite element method is adopted to investigate the interaction enhancement between the graphene flake and the optical mode. The impact of multilayer graphene on the performance of phase modulator is studied comprehensively. Simulation results show that the modulation efficiency improves with the increment of graphene layer number, as well as the modulation length. The 3-dB bandwidth of around 48 GHz is independent of graphene layer number and length. Compared to modulator with two-or four-layer graphene, the six-layer graphene/silicon nitride waveguide modulator can realize π phase shift at a low-power consumption of 14 fJ/bit when the modulation length is 240 μm.

关键词: electro-optic modulator, graphene, silicon nitride, waveguide

Abstract: Electro-optic modulator is a key component for on-chip optical signal processing. An electro-optic phase modulator based on multilayer graphene embedded in silicon nitride waveguide is demonstrated to fulfill low-power operation. Finite element method is adopted to investigate the interaction enhancement between the graphene flake and the optical mode. The impact of multilayer graphene on the performance of phase modulator is studied comprehensively. Simulation results show that the modulation efficiency improves with the increment of graphene layer number, as well as the modulation length. The 3-dB bandwidth of around 48 GHz is independent of graphene layer number and length. Compared to modulator with two-or four-layer graphene, the six-layer graphene/silicon nitride waveguide modulator can realize π phase shift at a low-power consumption of 14 fJ/bit when the modulation length is 240 μm.

Key words: electro-optic modulator, graphene, silicon nitride, waveguide

中图分类号:  (Optical processors, correlators, and modulators)

  • 42.79.Hp
42.79.Gn (Optical waveguides and couplers) 78.67.Wj (Optical properties of graphene)