中国物理B ›› 2018, Vol. 27 ›› Issue (7): 74210-074210.doi: 10.1088/1674-1056/27/7/074210

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇    下一篇

Novel single-transverse-mode control of VCSELs with dielectric mode filter

Lei Xiang(向磊), Xing Zhang(张星), Jian-Wei Zhang(张建伟), You-Wen Huang(黄佑文), Yong-Qiang Ning(宁永强), Li-Jun Wang(王立军)   

  1. 1 Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
    2 University of Chinese Academy of Sciences, Beijing 100049, China
  • 收稿日期:2018-01-24 修回日期:2018-04-03 出版日期:2018-07-05 发布日期:2018-07-05
  • 通讯作者: Xing Zhang E-mail:zhangx@ciomp.ac.cn
  • 基金资助:
    Project supported by the National Key Research and Development Project, China (Grant No. 2017YFB0503200), the National Natural Science Foundation of China (Grant Nos. 61434005, 61474118, 11774343, and 11674314), the Science and Technology Program of Jilin Province, China (Grant No. 20160203013GX), and the Youth Innovation Promotion Association, China (Grant No. 2017260).

Novel single-transverse-mode control of VCSELs with dielectric mode filter

Lei Xiang(向磊)1,2, Xing Zhang(张星)1, Jian-Wei Zhang(张建伟)1, You-Wen Huang(黄佑文)1,2, Yong-Qiang Ning(宁永强)1, Li-Jun Wang(王立军)1   

  1. 1 Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
    2 University of Chinese Academy of Sciences, Beijing 100049, China
  • Received:2018-01-24 Revised:2018-04-03 Online:2018-07-05 Published:2018-07-05
  • Contact: Xing Zhang E-mail:zhangx@ciomp.ac.cn
  • Supported by:
    Project supported by the National Key Research and Development Project, China (Grant No. 2017YFB0503200), the National Natural Science Foundation of China (Grant Nos. 61434005, 61474118, 11774343, and 11674314), the Science and Technology Program of Jilin Province, China (Grant No. 20160203013GX), and the Youth Innovation Promotion Association, China (Grant No. 2017260).

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摘要： We establish a novel method of controlling the transverse modes of vertical cavity surface emitting lasers (VCSELs) to achieve 1 mW single-fundamental-mode lasing. A dielectric mode filter is installed on top of the VCSEL. The dielectric layer (SiO2) is deposited and patterned to modify the mirror reflectivity across the oxide aperture via antiphase reflections. This mode selection is nondestructive and universally applicable for other structures under single transverse mode. Destructive etching techniques (dry/wet) or epitaxial regrowth are also not required. This method simplifies the preparation process and improves the repeatability of the device. Measurements show that under continuous-wave current injection, the side-mode suppression ratio exceeds 30 dB.

关键词: single-mode, dielectric mode filter, anti-phase reflection, mirror reflectivity, VCSEL

Abstract: We establish a novel method of controlling the transverse modes of vertical cavity surface emitting lasers (VCSELs) to achieve 1 mW single-fundamental-mode lasing. A dielectric mode filter is installed on top of the VCSEL. The dielectric layer (SiO2) is deposited and patterned to modify the mirror reflectivity across the oxide aperture via antiphase reflections. This mode selection is nondestructive and universally applicable for other structures under single transverse mode. Destructive etching techniques (dry/wet) or epitaxial regrowth are also not required. This method simplifies the preparation process and improves the repeatability of the device. Measurements show that under continuous-wave current injection, the side-mode suppression ratio exceeds 30 dB.

Key words: single-mode, dielectric mode filter, anti-phase reflection, mirror reflectivity, VCSEL

中图分类号:  (Semiconductor lasers; laser diodes)

  • 42.55.Px
42.62.Fi (Laser spectroscopy)