中国物理B ›› 2022, Vol. 31 ›› Issue (3): 34208-034208.doi: 10.1088/1674-1056/ac16d0

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Improved thermal property of strained InGaAlAs/AlGaAs quantum wells for 808-nm vertical cavity surface emitting lasers

Zhuang-Zhuang Zhao(赵壮壮), Meng Xun(荀孟), Guan-Zhong Pan(潘冠中), Yun Sun(孙昀), Jing-Tao Zhou(周静涛), and De-Xin Wu(吴德馨)   

  1. Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 收稿日期:2021-05-30 修回日期:2021-07-04 接受日期:2021-07-22 出版日期:2022-02-22 发布日期:2022-03-01
  • 通讯作者: Meng Xun E-mail:xunmeng@ime.ac.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 61804175), the Key Research Program of Frontier Sciences, Chinese Academy of Sciences (Grant No. ZDBS-LY-JSC031), and the China Postdoctoral Science Foundation (Grant No. BX20200358).

Improved thermal property of strained InGaAlAs/AlGaAs quantum wells for 808-nm vertical cavity surface emitting lasers

Zhuang-Zhuang Zhao(赵壮壮), Meng Xun(荀孟), Guan-Zhong Pan(潘冠中), Yun Sun(孙昀), Jing-Tao Zhou(周静涛), and De-Xin Wu(吴德馨)   

  1. Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • Received:2021-05-30 Revised:2021-07-04 Accepted:2021-07-22 Online:2022-02-22 Published:2022-03-01
  • Contact: Meng Xun E-mail:xunmeng@ime.ac.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 61804175), the Key Research Program of Frontier Sciences, Chinese Academy of Sciences (Grant No. ZDBS-LY-JSC031), and the China Postdoctoral Science Foundation (Grant No. BX20200358).

摘要: The 808-nm vertical cavity surface emitting laser (VCSEL) with strained In0.13Ga0.75Al0.12As/Al0.3Ga0.7As quantum wells is designed and fabricated. Compared with the VCSELs with Al0.05Ga0.95As/Al0.3Ga0.7As quantum wells, the VCSEL with strained In0.13Ga0.75Al0.12As/Al0.3Ga0.7As quantum wells is demonstrated to possess higher power conversion efficiency (PCE) and better temperature stability. The maximum PCE of 43.8% for 10-μm VCSEL is achieved at an ambient temperature of 30 ℃. The size-dependent thermal characteristics are also analyzed by characterizing the spectral power and output power. It demonstrates that small oxide-aperture VCSELs are advantageous for temperature-stable performance.

关键词: 808-nm VCSEL, InGaAlAs/AlGaAs quantum wells, thermal property

Abstract: The 808-nm vertical cavity surface emitting laser (VCSEL) with strained In0.13Ga0.75Al0.12As/Al0.3Ga0.7As quantum wells is designed and fabricated. Compared with the VCSELs with Al0.05Ga0.95As/Al0.3Ga0.7As quantum wells, the VCSEL with strained In0.13Ga0.75Al0.12As/Al0.3Ga0.7As quantum wells is demonstrated to possess higher power conversion efficiency (PCE) and better temperature stability. The maximum PCE of 43.8% for 10-μm VCSEL is achieved at an ambient temperature of 30 ℃. The size-dependent thermal characteristics are also analyzed by characterizing the spectral power and output power. It demonstrates that small oxide-aperture VCSELs are advantageous for temperature-stable performance.

Key words: 808-nm VCSEL, InGaAlAs/AlGaAs quantum wells, thermal property

中图分类号:  (Semiconductor lasers; laser diodes)

  • 42.55.Px
42.55.Sa (Microcavity and microdisk lasers) 73.21.Fg (Quantum wells)