[11] |
Breden D, Miki K and Raja L 2012 Plasma Sources Sci. T. 21 034011
|
[1] |
Lu X, Naidis G V, Laroussi M and Ostrikov K 2014 Phys. Rep. 540 123
|
[12] |
Munoz J and Calzada M D 2008 J. Phys. D-Appl. Phys. 41 135203
|
[2] |
Lu X, Naidis G V, Laroussi M, Reuter S, Graves D B and Ostrikov K 2016 Phys. Rep. 630 1
|
[13] |
Takamura S, Amano S, Kurata T, Kasada H, Yamamoto J, Razzak M A, Kushida G, Ohno N and Kando M 2011 J. Appl. Phys. 110 043301
|
[3] |
Lu X, Laroussi M and Puech V 2012 Plasma Sources Sci. T. 21 034005
|
[14] |
Chen Z, Xia G, Zhou Q, Hu Y, Zheng X, Zheng Z, Hong L, Li P, Huang Y and Liu M 2012 Rev. Sci. Instrum. 83 084701
|
[4] |
Lee H W, Kang S K, Won I H, Kim H Y, Kwon H C, Sim J Y and Lee J K 2013 Phys. Plasmas 20 123506
|
[15] |
Chen Z, Liu M, Xia G and Huang Y 2012 IEEE T. Plasma Sci. 40 2861
|
[5] |
Urabe K, Morita T, Tachibana K and Ganguly B 2010 J. Phys. D-Appl. Phys. 43 095201
|
[16] |
Hnilica J, Kudrle V, Vasina P, Schafer J and Aubrecht V 2012 J. Phys. D-Appl. Phys. 45 055201
|
[6] |
Yue Y, Wu F, Cheng H, Xian Y, Liu D, Lu X and Pei X 2017 J. Appl. Phys. 121 033302
|
[17] |
Chen C, Li S, Wu Y, Li Z, Zhang J and Wang Y 2016 Phys. Plasmas 23 123501
|
[7] |
Wu S, Huang Q, Wang Z and Lu X 2011 IEEE T. Plasma Sci. 39 2286
|
[18] |
Kang S K, Kim H Y, Yun G S and Lee J K 2015 Plasma Sources Sci. T. 24 035020
|
[8] |
Sakiyama Y, Graves D, Jarrige J and Laroussi M 2010 Appl. Phys. Lett. 96 041501
|
[19] |
Choi J, Iza F, Do H J, Lee J K and Cho M H 2009 Plasma Sources Sci. T. 18 025029
|
[9] |
Naidis G V 2011 J. Phys. D-Appl. Phys. 44 215203
|
[20] |
Chen Z, Liu X, Zou C, Song X, Li P, Hu Y, Qiu H, Kudryavtsev A A and Zhu M 2017 J. Appl. Phys. 121 023302
|
[10] |
Boeuf J, Yang L and Pitchford L 2013 J. Phys. D-Appl. Phys. 46 015201
|
[21] |
Chen Z, Xia G, Zou C, Liu X, Feng D, Li P, Hu Y, Stepanova O and Kudryavtsev A A 2017 J. Appl. Phys. 122 093301
|
[11] |
Breden D, Miki K and Raja L 2012 Plasma Sources Sci. T. 21 034011
|
[22] |
Hopwood J, Hoskinson A R and Gregório J 2014 Plasma Sources Sci. T. 23 064002
|
[12] |
Munoz J and Calzada M D 2008 J. Phys. D-Appl. Phys. 41 135203
|
[23] |
Wu C, Hoskinson A R and Hopwood J 2011 Plasma Sources Sci. T. 20 045022
|
[13] |
Takamura S, Amano S, Kurata T, Kasada H, Yamamoto J, Razzak M A, Kushida G, Ohno N and Kando M 2011 J. Appl. Phys. 110 043301
|
[24] |
Hoskinson A R and Hopwood J 2012 Plasma Sources Sci. T. 21 052002
|
[14] |
Chen Z, Xia G, Zhou Q, Hu Y, Zheng X, Zheng Z, Hong L, Li P, Huang Y and Liu M 2012 Rev. Sci. Instrum. 83 084701
|
[25] |
Zhang Z and Hopwood J 2009 Appl. Phys. Lett. 95 161502
|
[15] |
Chen Z, Liu M, Xia G and Huang Y 2012 IEEE T. Plasma Sci. 40 2861
|
[16] |
Hnilica J, Kudrle V, Vasina P, Schafer J and Aubrecht V 2012 J. Phys. D-Appl. Phys. 45 055201
|
[26] |
Gregório J, Hoskinson A R and Hopwood J 2015 J. Appl. Phys. 118 083305
|
[27] |
Monfared S K, Hoskinson A R and Hopwood J 2013 J. Phys. D-Appl. Phys. 46 425201
|
[17] |
Chen C, Li S, Wu Y, Li Z, Zhang J and Wang Y 2016 Phys. Plasmas 23 123501
|
[18] |
Kang S K, Kim H Y, Yun G S and Lee J K 2015 Plasma Sources Sci. T. 24 035020
|
[28] |
Miura N and Hopwood J 2011 J. Appl. Phys. 109 113303
|
[29] |
Hoskinson A R, Gregório J, Hopwood J, Galbally-Kinney K L, Davis S J and Rawlins W T 2017 J. Appl. Phys. 121 153302
|
[19] |
Choi J, Iza F, Do H J, Lee J K and Cho M H 2009 Plasma Sources Sci. T. 18 025029
|
[30] |
Kang S K, Seo Y S, Lee H W, Aman-ur-Rehman, Kim G C and Lee J K 2011 J. Phys. D-Appl. Phys. 44 435201
|
[20] |
Chen Z, Liu X, Zou C, Song X, Li P, Hu Y, Qiu H, Kudryavtsev A A and Zhu M 2017 J. Appl. Phys. 121 023302
|
[21] |
Chen Z, Xia G, Zou C, Liu X, Feng D, Li P, Hu Y, Stepanova O and Kudryavtsev A A 2017 J. Appl. Phys. 122 093301
|
[31] |
Chen Z, Xia G, Zou C, Li P, Hu Y, Ye Q, Eliseev S, Stepanova O, Saifutdinov A I, Kudryavtsev A A and Liu M 2015 J. Appl. Phys. 118 023307
|
[32] |
Chen Z, Yin Z, Chen M, Hong L, Xia G, Hu Y, Huang Y, Liu M and Kudryavtsev A A 2014 J. Appl. Phys. 116 153303
|
[22] |
Hopwood J, Hoskinson A R and Gregório J 2014 Plasma Sources Sci. T. 23 064002
|
[23] |
Wu C, Hoskinson A R and Hopwood J 2011 Plasma Sources Sci. T. 20 045022
|
[33] |
Chen Z, Yin Z, Xia G, Hong L, Hu Y, Liu M, Hu X and Kudryavtsev A A 2015 Chin. Phys. B 24 025203
|
[24] |
Hoskinson A R and Hopwood J 2012 Plasma Sources Sci. T. 21 052002
|
[34] |
Chen Z, Yin Z, Huang Y, Stepanova O, Gutsev S and Kudryavtsev A A 2015 IEEE T. Plasma Sci. 43 906
|
[25] |
Zhang Z and Hopwood J 2009 Appl. Phys. Lett. 95 161502
|
[35] |
Chen Z, Hu D, Liu M, Xia G, Zheng X, Hu Y, Ye Q, Chen M, Zhu L and Hu X 2014 Chin. Phys. B 23 035202
|
[36] |
Raizer Y P 1991 Gas Discharge Physics (Berlin:Springer)
|
[26] |
Gregório J, Hoskinson A R and Hopwood J 2015 J. Appl. Phys. 118 083305
|
[27] |
Monfared S K, Hoskinson A R and Hopwood J 2013 J. Phys. D-Appl. Phys. 46 425201
|
[37] |
Raether H 1988 Surface Plasmons (New York:Springer)
|
[38] |
Kalluri D K 2011 Electromagnetic Waves, Materials, and Computation with MATLAB (Taylor & Francis Group)
|
[28] |
Miura N and Hopwood J 2011 J. Appl. Phys. 109 113303
|
[39] |
Carbone E, Hubner S, Palomares J M and Mullen M van der J A 2012 J. Phys. D-Appl. Phys. 45 345203
|
[29] |
Hoskinson A R, Gregório J, Hopwood J, Galbally-Kinney K L, Davis S J and Rawlins W T 2017 J. Appl. Phys. 121 153302
|
[40] |
Carbone E and Nijdam S 2014 Plasma Sources Sci. T. 23 012001
|
[30] |
Kang S K, Seo Y S, Lee H W, Aman-ur-Rehman, Kim G C and Lee J K 2011 J. Phys. D-Appl. Phys. 44 435201
|
[41] |
Carbone E, Sadeghi N, Vos E, Hubner S, Veldhuizen van E, Dijkvan J, Nijdam S and Kroesen G 2015 Plasma Sources Sci. T. 24 015015
|
[31] |
Chen Z, Xia G, Zou C, Li P, Hu Y, Ye Q, Eliseev S, Stepanova O, Saifutdinov A I, Kudryavtsev A A and Liu M 2015 J. Appl. Phys. 118 023307
|
[42] |
Liu X, Pei X, Lu X and Liu D 2014 Plasma Sources Sci. T. 23 035007
|
[32] |
Chen Z, Yin Z, Chen M, Hong L, Xia G, Hu Y, Huang Y, Liu M and Kudryavtsev A A 2014 J. Appl. Phys. 116 153303
|
[43] |
Yue Y, Xian Y, Pei X and Lu X 2016 Phys. Plasmas 23 123503
|
[33] |
Chen Z, Yin Z, Xia G, Hong L, Hu Y, Liu M, Hu X and Kudryavtsev A A 2015 Chin. Phys. B 24 025203
|
[34] |
Chen Z, Yin Z, Huang Y, Stepanova O, Gutsev S and Kudryavtsev A A 2015 IEEE T. Plasma Sci. 43 906
|
[44] |
Hoskinson A R, Gregório J, Parsons S and Hopwood J 2015 J. Appl. Phys. 117 163301
|
[35] |
Chen Z, Hu D, Liu M, Xia G, Zheng X, Hu Y, Ye Q, Chen M, Zhu L and Hu X 2014 Chin. Phys. B 23 035202
|
[45] |
Kourtzanidis K, Boeuf J P and Rogier F 2014 Phys. Plasmas 21 123513
|
[36] |
Raizer Y P 1991 Gas Discharge Physics (Berlin:Springer)
|
[46] |
Gregório J, Parsons S and Hopwood J 2016 Plasma Sources Sci. T. 25 035018
|
[37] |
Raether H 1988 Surface Plasmons (New York:Springer)
|
[47] |
Zhao G L, Hua W, Guo S Y and Liu Z L 2016 Phys. Plasmas 23 073503
|
[38] |
Kalluri D K 2011 Electromagnetic Waves, Materials, and Computation with MATLAB (Taylor & Francis Group)
|
[48] |
Zhang D, Zhou R, Yang X Q and Wu S Y 2016 Phys. Plasmas 23 073504
|
[39] |
Carbone E, Hubner S, Palomares J M and Mullen M van der J A 2012 J. Phys. D-Appl. Phys. 45 345203
|
[49] |
Chu H, Ren F, Feng Y, Gu M and Zheng S 2017 Appl. Therm. Eng. 124 362
|
[50] |
Levko D and Raja L L 2016 J. Appl. Phys. 119 163303
|
[40] |
Carbone E and Nijdam S 2014 Plasma Sources Sci. T. 23 012001
|
[41] |
Carbone E, Sadeghi N, Vos E, Hubner S, Veldhuizen van E, Dijkvan J, Nijdam S and Kroesen G 2015 Plasma Sources Sci. T. 24 015015
|
[51] |
Levko D and Raja L L 2015 J. Appl. Phys. 118 043303
|
[42] |
Liu X, Pei X, Lu X and Liu D 2014 Plasma Sources Sci. T. 23 035007
|
[52] |
Chen Z, Ye Q, Xia G, Hong L, Hu Y, Zheng X, Li P, Zhou Q, Hu X and Liu M 2013 Phys. Plasmas 20 033502
|
[43] |
Yue Y, Xian Y, Pei X and Lu X 2016 Phys. Plasmas 23 123503
|
[53] |
Chen Z, Yin Z, Chen M, Liu M, Xu G, Hu Y, Xia G, Song X, Jia X and Hu X 2014 Acta Phys. Sin. 63 095205(in Chinese)
|
[54] |
Kwon H C, Jung S Y, Kim H Y, Won I H and Lee J K 2014 Phys. Plasmas 21 033511
|
[44] |
Hoskinson A R, Gregório J, Parsons S and Hopwood J 2015 J. Appl. Phys. 117 163301
|
[45] |
Kourtzanidis K, Boeuf J P and Rogier F 2014 Phys. Plasmas 21 123513
|
[55] |
Chen Z, Xia G, Liu M, Zheng X, Hu Y, Li P, Xu G, Hong L, Shen H and Hu X 2013 Acta Phys. Sin. 62 195204(in Chinese)
|
[56] |
Zhu L, Chen Z, Yin Z, Wang G, Xia G, Hu Y, Zheng X, Zhou M, Chen M and Liu M 2014 Chin. Phys. Lett. 31 035203
|
[46] |
Gregório J, Parsons S and Hopwood J 2016 Plasma Sources Sci. T. 25 035018
|
[47] |
Zhao G L, Hua W, Guo S Y and Liu Z L 2016 Phys. Plasmas 23 073503
|
[48] |
Zhang D, Zhou R, Yang X Q and Wu S Y 2016 Phys. Plasmas 23 073504
|
[49] |
Chu H, Ren F, Feng Y, Gu M and Zheng S 2017 Appl. Therm. Eng. 124 362
|
[50] |
Levko D and Raja L L 2016 J. Appl. Phys. 119 163303
|
[51] |
Levko D and Raja L L 2015 J. Appl. Phys. 118 043303
|
[52] |
Chen Z, Ye Q, Xia G, Hong L, Hu Y, Zheng X, Li P, Zhou Q, Hu X and Liu M 2013 Phys. Plasmas 20 033502
|
[53] |
Chen Z, Yin Z, Chen M, Liu M, Xu G, Hu Y, Xia G, Song X, Jia X and Hu X 2014 Acta Phys. Sin. 63 095205(in Chinese)
|
[54] |
Kwon H C, Jung S Y, Kim H Y, Won I H and Lee J K 2014 Phys. Plasmas 21 033511
|
[55] |
Chen Z, Xia G, Liu M, Zheng X, Hu Y, Li P, Xu G, Hong L, Shen H and Hu X 2013 Acta Phys. Sin. 62 195204(in Chinese)
|
[56] |
Zhu L, Chen Z, Yin Z, Wang G, Xia G, Hu Y, Zheng X, Zhou M, Chen M and Liu M 2014 Chin. Phys. Lett. 31 035203
|