Nanodots and microwires of ZrO2 grown on LaAlO3 by photo-assisted metal-organic chemical vapor deposition

doi:10.1088/1674-1056/25/2/028103

中国物理B ›› 2016, Vol. 25 ›› Issue (2): 28103-028103.doi: 10.1088/1674-1056/25/2/028103

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇下一篇

Nanodots and microwires of ZrO₂ grown on LaAlO₃ by photo-assisted metal-organic chemical vapor deposition

Feng Guo(郭峰), Xin-Sheng Wang(汪薪生), Shi-Wei Zhuang(庄仕伟), Guo-Xing Li(李国兴), Bao-Lin Zhang(张宝林), Pen-Chu Chou(周本初)

State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

收稿日期:2015-08-04 修回日期:2015-10-07 出版日期:2016-02-05 发布日期:2016-02-05
通讯作者: Guo-Xing Li E-mail:liguoxing@jlu.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 51002063) and the International Science and Technology Cooperation Program of Science and Technology Bureau of Changchun City, China (Grant No. 12ZX68).

Nanodots and microwires of ZrO₂ grown on LaAlO₃ by photo-assisted metal-organic chemical vapor deposition

Feng Guo(郭峰), Xin-Sheng Wang(汪薪生), Shi-Wei Zhuang(庄仕伟), Guo-Xing Li(李国兴), Bao-Lin Zhang(张宝林), Pen-Chu Chou(周本初)

State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

Received:2015-08-04 Revised:2015-10-07 Online:2016-02-05 Published:2016-02-05
Contact: Guo-Xing Li E-mail:liguoxing@jlu.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 51002063) and the International Science and Technology Cooperation Program of Science and Technology Bureau of Changchun City, China (Grant No. 12ZX68).

摘要/Abstract

摘要： ZrO₂ nanodots are successfully prepared on LaAlO₃ (LAO) (100) substrates by photo-assisted metal-organic chemical vapor deposition (MOCVD). It is indicated that the sizes and densities of ZrO₂ nanodots are controllable by modulating the growth temperature, oxygen partial pressure, and growth time. Meanwhile, the microwires are observed on the surfaces of substrates. It is found that there is an obvious competitive relationship between the nanodots and the microwires. In a growth temperature range from 500 ℃ to 660 ℃, the microwires turn longest and widest at 600 ℃, but in contrast, the nanodots grow into the smallest diameter at 600 ℃. This phenomenon could be illustrated by the energy barrier, decomposition rate of Zr(tmhd)₄, and mobility of atoms. In addition, growth time or oxygen partial pressure also affects the competitive relationship between the nanodots and the microwires. With increasing oxygen partial pressure from 451 Pa to 752 Pa, the microwires gradually grow larger while the nanodots become smaller. To further achieve the controllable growth, the coarsening effect of ZrO₂ is modified by varying the growth time, and the experimental results show that the coarsening effect of microwires is higher than that of nanodots by increasing the growth time to quickly minimize ZrO₂ energy density.

关键词: ZrO₂, photo-assisted MOCVD, nanodots, microwires

Abstract: ZrO₂ nanodots are successfully prepared on LaAlO₃ (LAO) (100) substrates by photo-assisted metal-organic chemical vapor deposition (MOCVD). It is indicated that the sizes and densities of ZrO₂ nanodots are controllable by modulating the growth temperature, oxygen partial pressure, and growth time. Meanwhile, the microwires are observed on the surfaces of substrates. It is found that there is an obvious competitive relationship between the nanodots and the microwires. In a growth temperature range from 500 ℃ to 660 ℃, the microwires turn longest and widest at 600 ℃, but in contrast, the nanodots grow into the smallest diameter at 600 ℃. This phenomenon could be illustrated by the energy barrier, decomposition rate of Zr(tmhd)₄, and mobility of atoms. In addition, growth time or oxygen partial pressure also affects the competitive relationship between the nanodots and the microwires. With increasing oxygen partial pressure from 451 Pa to 752 Pa, the microwires gradually grow larger while the nanodots become smaller. To further achieve the controllable growth, the coarsening effect of ZrO₂ is modified by varying the growth time, and the experimental results show that the coarsening effect of microwires is higher than that of nanodots by increasing the growth time to quickly minimize ZrO₂ energy density.

Key words: ZrO₂, photo-assisted MOCVD, nanodots, microwires

中图分类号: (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))

81.15.Gh

81.15.Kk (Vapor phase epitaxy; growth from vapor phase)

郭峰, 汪薪生, 庄仕伟, 李国兴, 张宝林, 周本初. Nanodots and microwires of ZrO₂ grown on LaAlO₃ by photo-assisted metal-organic chemical vapor deposition[J]. 中国物理B, 2016, 25(2): 28103-028103.

Feng Guo(郭峰), Xin-Sheng Wang(汪薪生), Shi-Wei Zhuang(庄仕伟), Guo-Xing Li(李国兴), Bao-Lin Zhang(张宝林), Pen-Chu Chou(周本初). Nanodots and microwires of ZrO₂ grown on LaAlO₃ by photo-assisted metal-organic chemical vapor deposition[J]. Chin. Phys. B, 2016, 25(2): 28103-028103.

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Nanodots and microwires of ZrO₂ grown on LaAlO₃ by photo-assisted metal-organic chemical vapor deposition

Nanodots and microwires of ZrO₂ grown on LaAlO₃ by photo-assisted metal-organic chemical vapor deposition

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