中国物理B ›› 2014, Vol. 23 ›› Issue (4): 44210-044210.doi: 10.1088/1674-1056/23/4/044210

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇    下一篇

Novel wavelength-accurate InP-based arrayed waveguide grating

潘盼, 安俊明, 王红杰, 王玥, 张家顺, 王亮亮, 代红庆, 张晓光, 吴远大, 胡雄伟   

  1. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 收稿日期:2013-07-20 修回日期:2013-09-11 出版日期:2014-04-15 发布日期:2014-04-15
  • 基金资助:
    Project supported by the National High Technology Research and Development Program of China (Grant Nos. 2011AA010303 and 2013AA031401) and the National Natural Science Foundation of China (Grant No. 61090390).

Novel wavelength-accurate InP-based arrayed waveguide grating

Pan Pan (潘盼), An Jun-Ming (安俊明), Wang Hong-Jie (王红杰), Wang Yue (王玥), Zhang Jia-Shun (张家顺), Wang Liang-Liang (王亮亮), Dai Hong-Qing (代红庆), Zhang Xiao-Guang (张晓光), Wu Yuan-Da (吴远大), Hu Xiong-Wei (胡雄伟)   

  1. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • Received:2013-07-20 Revised:2013-09-11 Online:2014-04-15 Published:2014-04-15
  • Contact: An Jun-Ming E-mail:junming@semi.ac.cn
  • About author:42.82.Gw; 42.79.Sz; 42.82.Bq
  • Supported by:
    Project supported by the National High Technology Research and Development Program of China (Grant Nos. 2011AA010303 and 2013AA031401) and the National Natural Science Foundation of China (Grant No. 61090390).

摘要: A 13-channel, InP-based arrayed waveguide grating (AWG) is designed and fabricated in which the on-chip loss of the central channel is about-5 dB and the crosstalk is less than-23 dB in the center of the spectrum response. However, the central wavelength and channel spacing are deviated from the design values. To improve their accuracy, an optimized design is adopted to compensate the process error. As a result, the central wavelength 1549.9 nm and channel spacing 1.59 nm are obtained in the experiment, while their design values are 1549.32 nm and 1.6 nm, respectively. The route capability and thermo-optic characteristic of the AWG are also discussed in detail.

关键词: arrayed waveguide grating, wavelength accuracy, thermo-optical characteristic, router

Abstract: A 13-channel, InP-based arrayed waveguide grating (AWG) is designed and fabricated in which the on-chip loss of the central channel is about-5 dB and the crosstalk is less than-23 dB in the center of the spectrum response. However, the central wavelength and channel spacing are deviated from the design values. To improve their accuracy, an optimized design is adopted to compensate the process error. As a result, the central wavelength 1549.9 nm and channel spacing 1.59 nm are obtained in the experiment, while their design values are 1549.32 nm and 1.6 nm, respectively. The route capability and thermo-optic characteristic of the AWG are also discussed in detail.

Key words: arrayed waveguide grating, wavelength accuracy, thermo-optical characteristic, router

中图分类号:  (Other integrated-optical elements and systems)

  • 42.82.Gw
42.79.Sz (Optical communication systems, multiplexers, and demultiplexers?) 42.82.Bq (Design and performance testing of integrated-optical systems)