中国物理B ›› 2013, Vol. 22 ›› Issue (6): 60309-060309.doi: 10.1088/1674-1056/22/6/060309

• GENERAL • 上一篇    下一篇

Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process

吴玉林, 邓辉, 于海峰, 薛光明, 田野, 李洁, 陈莺飞, 赵士平, 郑东宁   

  1. Beijing National Laboratory for Condensed Matter Physics, Institute of Physics,Chinese Academy of Sciences, Beijing 100190, China
  • 收稿日期:2013-01-31 修回日期:2013-02-27 出版日期:2013-05-01 发布日期:2013-05-01
  • 基金资助:
    Project supported by the Science Foundation of the Ministry of Science and Technology of China (Grant Nos. 2011CBA00106 and 2009CB929102), the National Natural Science Foundation of China (Grant Nos. 11104333, 10974243, and 11161130519), and the Knowledge Innovation Program of the Chinese Academy of Sciences.

Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process

Wu Yu-Lin (吴玉林), Deng Hui (邓辉), Yu Hai-Feng (于海峰), Xue Guang-Ming (薛光明), Tian Ye (田野), Li Jie (李洁), Chen Ying-Fei (陈莺飞), Zhao Shi-Ping (赵士平), Zheng Dong-Ning (郑东宁)   

  1. Beijing National Laboratory for Condensed Matter Physics, Institute of Physics,Chinese Academy of Sciences, Beijing 100190, China
  • Received:2013-01-31 Revised:2013-02-27 Online:2013-05-01 Published:2013-05-01
  • Contact: Zheng Dong-Ning E-mail:dzheng@aphy.iphy.ac.cn
  • Supported by:
    Project supported by the Science Foundation of the Ministry of Science and Technology of China (Grant Nos. 2011CBA00106 and 2009CB929102), the National Natural Science Foundation of China (Grant Nos. 11104333, 10974243, and 11161130519), and the Knowledge Innovation Program of the Chinese Academy of Sciences.

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摘要： Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks, Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density (jc) and wide range of junction sizes from 0.01 μm2 up to 1 μm2. We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for superconducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubit and charge-flux qubit.

关键词: Josephson junction, Al/AlOx/Al, superconducting qubit

Abstract: Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks, Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density (jc) and wide range of junction sizes from 0.01 μm2 up to 1 μm2. We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for superconducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubit and charge-flux qubit.

Key words: Josephson junction, Al/AlOx/Al, superconducting qubit

中图分类号:  (Quantum computation architectures and implementations)

  • 03.67.Lx
85.25.Cp (Josephson devices) 85.25.Dq (Superconducting quantum interference devices (SQUIDs))