中国物理B ›› 2013, Vol. 22 ›› Issue (2): 24202-024202.doi: 10.1088/1674-1056/22/2/024202

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇    下一篇

Microstructure and optical properties of nitrogen-doped ZnO film

赵显伟, 郜小勇, 陈先梅, 陈超, 赵孟珂   

  1. Key Laboratory of Material Physics (Ministry of Education), School ofPhysics and Engineering, Zhengzhou University, Zhengzhou 450052, China
  • 收稿日期:2012-05-05 修回日期:2012-07-17 出版日期:2013-01-01 发布日期:2013-01-01
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 60807001); the Foundation of Henan Educational Committee, China (Grant No. 2010A140017); and the Henan Provincial College Young Teachers Program and the Graduate Innovation of Zhengzhou University, China (Grant No. 11L10102).

Microstructure and optical properties of nitrogen-doped ZnO film

Zhao Xian-Wei (赵显伟), Gao Xiao-Yong (郜小勇), Chen Xian-Mei (陈先梅), Chen Chao (陈超), Zhao Meng-Ke (赵孟珂 )   

  1. Key Laboratory of Material Physics (Ministry of Education), School ofPhysics and Engineering, Zhengzhou University, Zhengzhou 450052, China
  • Received:2012-05-05 Revised:2012-07-17 Online:2013-01-01 Published:2013-01-01
  • Contact: Gao Xiao-Yong E-mail:xygao@zzu.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 60807001); the Foundation of Henan Educational Committee, China (Grant No. 2010A140017); and the Henan Provincial College Young Teachers Program and the Graduate Innovation of Zhengzhou University, China (Grant No. 11L10102).

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摘要： The nitrogen doping of ZnO film deposited by the magnetron sputtering method is subsequently realized by the hydrothermal synthesis method. The nitrogen-doped ZnO film is preferably (002) oriented. With the increase of hexamethylenetetramine (HMT) solution concentration, the average grain size of the film along the <002> direction almost immediately decreases and then monotonously increases, conversely, the lattice strain first increases and then decreases. The structural evolution of the film surface from compact and even to sparse and rough is attributed to the enhanced nitrogen doping content in the hydrothermal process. The transmission and photoluminescence properties of the film are closely related to grain size, lattice strain, and nitrogen-related defect arising from the enhanced nitrogen doping content with HMT concentration increasing.

关键词: nitrogen-doped ZnO film, hydrothermal method, optical properties

Abstract: The nitrogen doping of ZnO film deposited by the magnetron sputtering method is subsequently realized by the hydrothermal synthesis method. The nitrogen-doped ZnO film is preferably (002) oriented. With the increase of hexamethylenetetramine (HMT) solution concentration, the average grain size of the film along the <002> direction almost immediately decreases and then monotonously increases, conversely, the lattice strain first increases and then decreases. The structural evolution of the film surface from compact and even to sparse and rough is attributed to the enhanced nitrogen doping content in the hydrothermal process. The transmission and photoluminescence properties of the film are closely related to grain size, lattice strain, and nitrogen-related defect arising from the enhanced nitrogen doping content with HMT concentration increasing.

Key words: nitrogen-doped ZnO film, hydrothermal method, optical properties

中图分类号:  (Image forming and processing)

  • 42.30.Va
42.70.Ce (Glasses, quartz) 42.79.-e (Optical elements, devices, and systems)