中国物理B ›› 2012, Vol. 21 ›› Issue (3): 34208-034208.doi: 10.1088/1674-1056/21/3/034208

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇    下一篇

李岩,曲士良   

  • 收稿日期:2011-07-29 修回日期:2011-09-06 出版日期:2012-02-15 发布日期:2012-02-15
  • 通讯作者: 曲士良,slqu1@yahoo.com.cn E-mail:slqu1@yahoo.com.cn

The effects of heat treatment on microfluidic devices fabricated in silica glass by femtosecond lasers

Li Yan(李岩) and Qu Shi-Liang(曲士良)†   

  1. Department of Optoelectronics Science, Harbin Institute of Technology at Weihai, Weihai 264209, China
  • Received:2011-07-29 Revised:2011-09-06 Online:2012-02-15 Published:2012-02-15
  • Contact: Qu Shi-Liang,slqu1@yahoo.com.cn E-mail:slqu1@yahoo.com.cn
  • Supported by:
    Project supported by the Science and Technology Foundation of Heilongjiang Province, China (Grant No. A200912) and the Program of Excellence Team in the Harbin Institute of Technology, China.

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Abstract: We fabricated complex microfluidic devices in silica glass by water-assisted femtosecond laser ablation and subsequent heat treatment. The experimental results show that after heat treatment, the diameter of the microchannels is significantly reduced and the internal surface roughness is improved. The diameters of the fabricated microchannels can be modulated by changing the annealing temperature and the annealing time. During annealing, the temperature affects the diameter and shape of the protrusions in microfluidic devices very strongly, and these changes are mainly caused by uniform expansion and the action of surface tension.

Key words: water-assisted femtosecond laser ablation, microchannels, heat treatment

中图分类号:  (Laser applications)

  • 42.62.-b
47.85.Np (Fluidics) 52.38.Mf (Laser ablation)