中国物理B ›› 2009, Vol. 18 ›› Issue (8): 3484-3489.doi: 10.1088/1674-1056/18/8/058

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A numerical simulation of surface wave excitation in a rectangular planar-type plasma source

陈兆权, 刘明海, 蓝朝晖, 陈伟, 唐亮, 罗志清, 燕保荣, 吕建红, 胡希伟   

  1. Key Laboratory of Fusion and Advanced Electromagnetic Technology of Ministry of Education, College of Electrical \& Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
  • 收稿日期:2008-09-20 修回日期:2008-10-14 出版日期:2009-08-20 发布日期:2009-08-20
  • 基金资助:
    Project supported by the Foundation for Returned Scholars, the Ministry of Education of China.

A numerical simulation of surface wave excitation in a rectangular planar-type plasma source

Chen Zhao-Quan(陈兆权)†, Liu Ming-Hai(刘明海)‡, Lan Chao-Hui(蓝朝晖), Chen Wei(陈伟), Tang Liang(唐亮), Luo Zhi-Qing(罗志清), Yan Bao-Rong(燕保荣), Lü Jian-Hong(吕建红), and Hu Xi-Wei(胡希伟)   

  1. Key Laboratory of Fusion and Advanced Electromagnetic Technology of Ministry of Education, College of Electrical & Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
  • Received:2008-09-20 Revised:2008-10-14 Online:2009-08-20 Published:2009-08-20
  • Supported by:
    Project supported by the Foundation for Returned Scholars, the Ministry of Education of China.

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摘要： The principle of surface wave plasma discharge in a rectangular cavity is introduced simply based on surface plasmon polariton theory. The distribution of surface-wave electric field at the interface of the plasma-dielectric slab is investigated by using the three-dimensional finite-difference time-domain method (3D-FDTD) with different slot-antenna structures. And the experimental image of discharge with a novel slot antenna array and the simulation of the electric field with this slot antenna array are both displayed. Combined with the distribution of surface wave excitation and experimental results, the numerical simulation performed by using 3D-FDTD is shown to be a useful tool in the computer-aided antenna design for large area planar-type surface-wave plasma sources.

关键词: surface wave plasma, numerical simulation, three-dimensional finite-difference time-domain method, surface plasmons polaritons

Abstract: The principle of surface wave plasma discharge in a rectangular cavity is introduced simply based on surface plasmon polariton theory. The distribution of surface-wave electric field at the interface of the plasma-dielectric slab is investigated by using the three-dimensional finite-difference time-domain method (3D-FDTD) with different slot-antenna structures. And the experimental image of discharge with a novel slot antenna array and the simulation of the electric field with this slot antenna array are both displayed. Combined with the distribution of surface wave excitation and experimental results, the numerical simulation performed by using 3D-FDTD is shown to be a useful tool in the computer-aided antenna design for large area planar-type surface-wave plasma sources.

Key words: surface wave plasma, numerical simulation, three-dimensional finite-difference time-domain method, surface plasmons polaritons

中图分类号:  (Plasma sources)

  • 52.50.Dg
52.35.-g (Waves, oscillations, and instabilities in plasmas and intense beams) 52.40.Fd (Plasma interactions with antennas; plasma-filled waveguides) 52.65.-y (Plasma simulation) 52.80.-s (Electric discharges) 84.40.Ba (Antennas: theory, components and accessories)