中国物理B ›› 2009, Vol. 18 ›› Issue (1): 231-237.doi: 10.1088/1674-1056/18/1/038
刘永合1, J.A.Schaefer1, 董云开2, 张向军3
Zhang Xiang-Jun(张向军)a)b)†, Dong Yun-Kai (董云开)a), Liu Yong-He(刘永合)b), and J. A. Schaeferb)
摘要: A microtribometer is used to measure and compare pull-off forces and friction forces exerted on (a) micro-dimpled silicon surfaces, (b) bare silicon surfaces, and (c) octadecyltrichlorosilane (OTS) treated silicon surfaces at different relative humidity (RH) levels separately. It is found that above a critical RH level, the capillary pull-off force increases abruptly and that the micro-dimple textured surface has a lower critical RH value as well as a higher pull-off force value than the other two surfaces. A micro topography parameter, namely sidewall area ratio, is found to play a major role in controlling the capillary pull-off force. Furthermore, micro-dimpled silicon surface is also proved to be not sensitive to variation in RH level, and can realize a stable and decreased friction coefficient compared with un-textured silicon surfaces. The reservoir-like function of micro dimples is considered to weaken or avoid the breakage effect of liquid bridges at different RH levels, thereby maintaining a stable frictional behaviour.
中图分类号: (Dynamics (capillary waves))