中国物理B ›› 2006, Vol. 15 ›› Issue (12): 2959-2962.doi: 10.1088/1009-1963/15/12/032

• CLASSICAL AREAS OF PHENOMENOLOGY • 上一篇    下一篇

Micromechanical tunable vertical-cavity surface-emitting lasers

关宝璐, 郭 霞, 邓 军, 渠红伟, 廉 鹏, 董立敏, 陈　敏, 沈光地   

  1. Beijing Optoelectronic Technology Laboratory, Institute of Information, Beijing University of Technology, Beijing 100022, China
  • 收稿日期:2006-01-09 修回日期:2006-07-19 出版日期:2006-12-20 发布日期:2006-12-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No 60506012), the Fok Ying-Tong Foundation (Grant No 101062), the Natural Science Foundation of Beijing China (Grant No KZ200510005003), the Science Star of Beijing China (Grant

Micromechanical tunable vertical-cavity surface-emitting lasers

Guan Bao-Lu(关宝璐), Guo Xia(郭霞)† , Deng Jun(邓军), Qu Hong-Wei(渠红伟), Lian Peng(廉鹏), Dong Li-Min(董立敏), Chen Min(陈敏), and Shen Guang-Di(沈光地)   

  1. Beijing Optoelectronic Technology Laboratory, Institute of Information, Beijing University of Technology, Beijing 100022, China
  • Received:2006-01-09 Revised:2006-07-19 Online:2006-12-20 Published:2006-12-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No 60506012), the Fok Ying-Tong Foundation (Grant No 101062), the Natural Science Foundation of Beijing China (Grant No KZ200510005003), the Science Star of Beijing China (Grant

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摘要： We report the study on a short wavelength-tunable vertical-cavity surface-emitting laser utilizing a monolithically integrated bridge tuning microelectromechanical system. A deformable-bridge top mirror suspended above an active region is utilized. Applied bridge-substrate bias produces an electrostatic force which reduces the spacing of air-gap and tunes the resonant wavelength toward a shorter wavelength (blue-shift). Good laser characteristics are obtained: such as continuous tuning ranges over 11 nm near 940 nm for 0--9 V tuning bias, the peak output power near 1 mW and the full-width-half-maximum limited to approximately 3.2--6.8 nm. A detailed simulation of the micromechanical and optical characteristics of these devices is performed, and the ratio of bridge displacement to wavelength shift has been found to be 3:1.

Abstract: We report the study on a short wavelength-tunable vertical-cavity surface-emitting laser utilizing a monolithically integrated bridge tuning microelectromechanical system. A deformable-bridge top mirror suspended above an active region is utilized. Applied bridge-substrate bias produces an electrostatic force which reduces the spacing of air-gap and tunes the resonant wavelength toward a shorter wavelength (blue-shift). Good laser characteristics are obtained: such as continuous tuning ranges over 11 nm near 940 nm for 0--9 V tuning bias, the peak output power near 1 mW and the full-width-half-maximum limited to approximately 3.2--6.8 nm. A detailed simulation of the micromechanical and optical characteristics of these devices is performed, and the ratio of bridge displacement to wavelength shift has been found to be 3:1.

Key words: microelectromechanical devices, vertical-cavity surface-emitting lasers, tunable bridge, electrostatic tuning

中图分类号:  (Modulation, tuning, and mode locking)

  • 42.60.Fc
42.55.Px (Semiconductor lasers; laser diodes) 42.60.Da (Resonators, cavities, amplifiers, arrays, and rings)