中国物理B ›› 2002, Vol. 11 ›› Issue (2): 132-138.doi: 10.1088/1009-1963/11/2/306
Walter Lauriks1, Jan Thoen1, 高伟民2, Christ Glorieux3
Gao Wei-Min (高伟民)ab, Christ Glorieuxac,Walter Lauriksa, Jan Thoena
摘要: We present a laser ultrasonic method to investigate a titanium nitride (TiN) coating specimen. The technique is based on the principle of surface acoustic wave (SAW) dispersion during acoustic propagation on a half-space with the presence of a thin layer. Due to the high efficiency of laser line-source excitation, we have been able to generate and detect a SAW with an excellent signal-to-noise ratio in a wide frequency band. An inverse fitting algorithm was employed to extract simultaneously the thickness and the elastic parameters of the TiN coating from the experimental SAW velocity dispersion curve.
中图分类号: (Ultrasonic velocity, dispersion, scattering, diffraction, and Attenuation in solids; elastic constants)